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1.1 Overview of Semiconductor Technology

The design and fabrication processes of an IC are a highly complicated endeavor. Modern Very Large Scale Integration (VLSI) technology consists of hundreds of sequential process steps starting with a raw semiconductor wafer. These steps can be classified into three groups [EK95]:




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Next: 1.1.1 Lithography Up: 1. Introduction Previous: 1. Introduction
Mustafa Radi
1998-12-11