Publications

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3.

Paul Manstetten, Lado Filipovic, Andreas Hössinger, Josef Weinbub, Siegfried Selberherr

Framework to Model Neutral Particle Flux in Convex High Aspect Ratio Structures Using One-Dimensional Radiosity Journal Article

Solid-State Electronics, 128 , pp. 141-147, 2016, (invited).

Links | BibTeX | Tags: High Aspect Ratio, invited, Neutral Particle Flux, Plasma Etching, Radiosity, Solid-State Electronics

2.

Paul Manstetten, Lado Filipovic, Andreas Hössinger, Josef Weinbub, Siegfried Selberherr

Using One-Dimensional Radiosity to Model Neutral Particle Flux in High Aspect Ratio Holes Incollection

2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) , pp. 120-123, 2016.

Links | BibTeX | Tags: EUROSOI-ULIS, Growth Rate, High Aspect Ratio, Neutral Particle Flux, Plasma Etching, Radiosity

1.

Paul Manstetten, Lado Filipovic, Andreas Hössinger, Josef Weinbub, Siegfried Selberherr

Modeling Neutral Particle Flux in High Aspect Ratio Holes Using a One-Dimensional Radiosity Approach Inproceedings

Proceedings of the 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), pp. 68-69, 2016, ISBN: 978-3-901578-29-8.

Links | BibTeX | Tags: EUROSOI-ULIS, High Aspect Ratio, Neutral Particle Flux, Plasma Etching, Radiosity, Talk