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Paul Manstetten; Lado Filipovic; Andreas Hössinger; Josef Weinbub; Siegfried Selberherr

Using One-Dimensional Radiosity to Model Neutral Particle Flux in High Aspect Ratio Holes Incollection

2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) , pp. 120-123, 2016.

Links | BibTeX | Tags: EUROSOI-ULIS, Growth Rate, High Aspect Ratio, Neutral Particle Flux, Plasma Etching, Radiosity