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1.

Vito Šimonka; Georg Nawratil; Andreas Hössinger; Josef Weinbub; Siegfried Selberherr

Direction Dependent Three-Dimensional Silicon Carbide Oxidation Growth Rate Calculations Incollection

2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) , pp. 226-229 , 2016.

Links | BibTeX | Tags: EUROSOI-ULIS, Oxidation, SiC