The main research field is the development of software tools for the simulation of semiconductor devices and technological process steps. These tools are applied either to the improvement of existing ULSI semiconductor devices or to support the development of new technologies. As the institute does not have any direct access to fabrication facilities the successful research strongly relies on intensive co-operation with national, European, and international industrial partners. Furthermore, the institute is involved in Austrian and European research programmes. The current research activities concern:
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