List of Acronyms

AC ... alternating current
ACCUFET ... accumulation channel field-effect transistor
BFOM ... Baliga figure of merit
BGN ... band gap narrowing
BHFFOM ... Baliga high-frequency figure of merit
BJT ... bipolar junction transistor
BTE ... Boltzmann's transport equation
CV ... capacitance voltage
CVD ... chemical vapour deposition
CW ... continuous wave
DC ... direct current
DD ... drift-diffusion
DMOSFET ... double-diffused metal-oxide semiconductor field-effect transistor
ECR ... electron cyclotron resonance
FET ... field-effect transistor
FOM ... figure of merit
GTO ... gate turn-off
HD ... hydrodynamic
HBT ... hetrojunction bipolar transistor
ICP ... inductively coupled plasama
IMPATT ... impact ionization avalanche transit-time
IV ... current voltage
JBS ... junction barrier Schottky
JFET ... junction field-effect transistor
JFOM ... Johnson figure of merit
JTE ... junction termination extension
KFOM ... Keye figure of merit
LED ... light emitting diode

MAG ... maximum available gain
MC ... Monte Carlo
MEMS ... microelectromechanical systems
MESFET ... metal-semiconductor field-effect transistor
MODFET ... modulation doped field-effect transistor
MOS ... metal-oxide semiconductor
MOSFET ... metal-oxide semiconductor field-effect transistor
MPS ... merged PiN Schottky
MSG ... maximum stable gain
PAE ... power added efficiency
PiN ... positive-intrinsic-negative
RIE ... reactive ion eaching
RF ... radio frequency
RTE ... resestive termination extension
SAI-SIT ... self-aligned and ion implanted static induction transistor
SBD ... Schottky barrier diode
SEMOSFET ... static channel expansion metal-oxide semiconductor FET
SIT ... static induction transistor
SIAFET ... static induction injected accumulated field-effect transistor
SiC ... silicon carbide
SRH ... Shockley-Read-Hall
TCAD ... technology computer aided design
TEC ... thermal expansion coefficient
UV ... ultraviolet
UMOSFET ... U-shape metal-oxide semiconductor field-effect transistor
VJFET ... vertical junction field-effect transistor
VLSI ... very large scale integration

T. Ayalew: SiC Semiconductor Devices Technology, Modeling, and Simulation