Appendix G: Relations for the Lateral Profiling of Interface States and Fixed Oxide Charge by the Charge Pumping



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Appendix G

Relations for the Lateral Profiling of Interface States and Fixed Oxide Charge by the Charge Pumping

 

In this appendix we derive and collect the expressions used in the extraction of the spatial distributions of interface states and fixed oxide charge from charge-pumping experimental data. Derivations are carried out on a rigorous footing, without simplifications usually adopted in the literature. The differentiation of noisy data resulting from the two-dimensional numerical calculations is addressed briefly. The relationships obtained in this appendix are employed in Section 3.5.2.





Martin Stiftinger
Sat Oct 15 22:05:10 MET 1994