List of Publications

Author of

[1]

S. Halama, K. Wimmer, G. Hobler, and S.Selberherr. Finite-Differenzen Dreiecksnetzgenerierung für die Prozeßsimulation mit PROMIS. In NuTech, p 3, Garmisch-Partenkirchen, Germany, 1990.

[2]

S. Halama, G. Hobler, K. Wimmer, and S.Selberherr. Eine neue Methode zur Simulation der Diffusion in allgemeinen Strukturen. In Grundlagen und Technologie elektronischer Bauelemente, pp 20-26, Gesellschaft für Mikroelektronik, Vienna, Austria, 1991.

[3]

S. Halama, F. Fasching, H. Pimingstorfer, W. Tuppa, and S. Selberherr. Consistent User Interface and Task Level Architecture of a TCAD System. In Proc.NUPAD IV, pp 237-242, 1992.

[4]

S. Halama and S.Selberherr. Future Aspects of Process and Device Simulation. In Proc. Semiconductor Equipment and Technology, Warsaw, Poland, 1992.

[5]

S. Halama. Technologie-CAD made in AUSTRIA. ÖHZ, (11):9, 1992.

[6]

S. Halama and S. Selberherr. Future Aspects of Process and Device Simulation. In Electron Technology 26,1, pp 49-57, 1993.

[7]

S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, Ch. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, and S. Selberherr. The Viennese Integrated System for Technology CAD Applications. In Fasching et al. [4], pp 197-236.

[8]

S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, P. Lindorfer, Ch. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K.Wimmer, and S. Selberherr. The Viennese Integrated System for Technology CAD Applications. Microelectronics Journal, in publication, 1994.

Co-Author in

[9]

G. Hobler, S. Halama, W. Wimmer, S. Selberherr, and H. Pötzl. RTA-Simulations with the 2-D Process Simulator PROMIS. In Proc.NUPAD III, pp 13-14, 1990.

[10]

K. Wimmer, R. Bauer, S. Halama, G. Hobler, and S.Selberherr. Prozeßsimulation in nichtplanaren Strukturen mit PROMIS. In NuTech, p 4, Garmisch-Partenkirchen, Germany, 1990.

[11]

F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, P. Verhás, and K. Wimmer. An Integrated Technology CAD Environment. In VLSI Technology, Systems and Applications Symposium, pp 147-151, Taipeh, 1991.

[12]

F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, W. Tuppa, P. Verhas, and K. Wimmer. A New Open Techology CAD System. Microelectronic Engineering, pp 217-220, 1991.

[13]

H. Pimingstorfer, S. Halama, and S. Selberherr. A TCAD Environment for Process and Device Engineering. In International Conference on VLSI and CAD 91, pp 280-283, Seoul, 1991.

[14]

H. Pimingstorfer, S. Halama, S. Selberherr, K. Wimmer, and P. Verhas. A Technology CAD Shell. In W. Fichtner and D. Aemmer, editors, Simulation of Semiconductor Devices and Processes, volume 4, pp 409-416, Konstanz, 1991. Hartung-Gorre.

[15]

S. Selberherr, F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, H. Stippel, P. Verhas, and K. Wimmer. The Viennese TCAD System. In Proc.VPAD, pp 32-35, 1991.

[16]

K. Wimmer, R. Bauer, S. Halama, G. Hobler, and S. Selberherr. Transformation Mehods for Nonplanar Process Simulation. In W. Fichtner and D. Aemmer, editors, Simulation of Semiconductor Devices and Processes, volume 4, pp 120-121, Konstanz, 1991. Hartung-Gorre.

[17]

K.Wimmer, S. Halama, G. Hobler, and S.Selberherr. Simulation nichtplanarer Herstellungsprozesse mit PROMIS. In Grundlagen und Technologie elektronischer Bauelemente, pp 10-19, Gesellschaft für Mikroelektronik, Vienna, Austria, 1991.

[18]

H. Stippel, S. Halama, G. Hobler, K. Wimmer, and S. Selberherr. Adaptive Grid for Monte Carlo Simulation of Ion Implantation. In Proc.NUPAD IV, pp 231-236, 1992.

[19]

H. Stippel, F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, W. Tuppa, K. Wimmer, and S. Selberherr. Implementation of a TCAD Framework. In Proc. European Simulation Multiconference ESM 92, pp 131-135, 1992.

Edited Book

[20]

F. Fasching, S. Halama, and S. Selberherr, editors. Technology CAD Systems. Springer, 1993.