2.1.2 Direct Monitoring of VTH

To improve the measurement resolution of 1ms  , Reisinger et al. developed a fast VTH   -method [11], which is depicted in Fig. 2.2. It distinguishes two modes of operation: During the measurement-mode a constant and device-specific drain current V0∕R0   serves as “threshold current” ID(VTH )  -criterium.2 This is achieved by a feedback loop using an operating amplifier. Simultaneously, the resulting corresponding threshold voltage V
 TH   of the device is recorded. (The initial reference VTH,0   has to be measured in advance.) When switching to the stress-mode all contacts but the gate are grounded, the latter being set to VG =  Vstr   .


PIC


Figure 2.2: Fast-VTH   -method after Reisinger et al. [11]. When switched to the measurement-mode ‘m’ the drain current of the device under test (DUT) is forced to a constant (V0∕R0   ) by the feedback loop of the operating amplifier. At the same time the threshold voltage VTH   is measured. When switched to the stress-mode ‘s’, source and drain are grounded and only the gate is set to V  = V
 G    str   . The switching between the two modes is done by fast electronic switches.


With the fast-VTH   -method a measurement delay of tM = 1μs  has been achieved, equivalent to the settling time of the feedback loop. Compared to the studies of Rangan et al. [14], who only use off-the-shelf equipment, this results in a three decades faster read-out speed.