previous up next contents Previous: 3.1.2 Two-Dimensional Point Response Up: 3.1 Analytical Method Next: 3.1.4 Multi-layered Structures


3.1.3 Three-Dimensional Point Response Functions

There-dimensional point response functions are modeled as the two-dimensional ones except that the lateral function does not just depend on $ x$ but on the distance from the $ z$-axis ( $ \sqrt{x^2+y^2}$). The $ z$-axis is aligned to the ion beam direction.

$\displaystyle p(x,y,z) = p_v(z)\cdot p_l(\sqrt{x^2+y^2},\sigma_l(z),\gamma_l(z), \beta_l(z))$ (3.43)

previous up next contents Previous: 3.1.2 Two-Dimensional Point Response Up: 3.1 Analytical Method Next: 3.1.4 Multi-layered Structures


A. Hoessiger: Simulation of Ion Implantation for ULSI Technology