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3.3.3 Electronic Stopping Process

Modeling the electronic stopping process is very complicated, because several physical effects contribute to the inelastic energy loss.

All these effects occur due to core-electron and electron-electron interaction.

The most widely used technique for modeling the electronic stopping process is based on the local density approximation. It assumes that in each (infinitesimal) volume element of the target the interaction between the projectile and the target electrons depends only on one property of the target, namely the local electron density within this volume element. The local electron density $ \rho_e$ at a position $ \vec{r}$ is

$\displaystyle \rho_e = \sum\limits_i^{electrons} \vert\phi_i(\vec{r})\vert^2.$ (3.99)

$ \phi_i(\vec{r})$ are the single electron wave-functions of all electrons in the target. Furthermore the local density approximation assumes that the interaction of the moving ion with the electrons in a certain volume element equals the interaction of the moving point charge with electrons in an infinite free electron gas with the same homogeneous electron density. An infinite free electron gas is a theoretical model which assumes that electrons with a definite electron density are homogeneously distributed in the whole space and that no forces act on the electrons.

The local density approximation neglects:

Applying this approximation the remaining problems are to derive the energy loss of a point charge in a free electron gas and to determine an effective charge of the point charge in a free electron gas which optimally represents the behavior of the projectile in the solid.



Subsections previous up next contents Previous: 3.3.2.2 Average Nuclear Stopping Up: 3.3 Monte-Carlo Method Next: 3.3.3.1 Energy Loss of

A. Hoessiger: Simulation of Ion Implantation for ULSI Technology