List of Tables

• 2.1. Physical properties of some impurity species.
• 2.2. Physical properties of silicon at 25 $\,^\circ\;$C
• 2.3. Physical properties of silicon dioxide [19]
• 3.2. Maxima of the average nuclear stopping power for various atom pairs.
• 3.3. The electronic stopping power is only proportional to the velocity up to a maximal energy. These maximal energies are summarized for several ion species.
• 3.4. Experimentally determined Debye temperatures.
• 3.5. Parameters for the empirical recombination model for different ion species.
• 4.1. Empirical parameters for the electronic stopping model.
• 4.2. Parameters for the empirical recombination model for different molecular ion species.