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4.4 Numerical Implementation

In this section we describe the numerical implementation of Abbe's method of aerial image simulation. From the above discussion it can be seen that basically two Fourier transforms are required: Consequently, the calculation of the aerial image is in a certain sense ``exact'', i.e., no additional discretization errors are introduced by the numerical implementation. All approximations made throughout can be physically explained and therefore constitute a sound physical and mathematical basis of the aerial image simulator.



 
next up previous contents
Next: 4.4.1 ``Alias Free'' Forward Up: 4. Aerial Image Simulation Previous: 4.3.2 Hopkins' Method
Heinrich Kirchauer, Institute for Microelectronics, TU Vienna
1998-04-17