next up previous contents
Next: Curriculum Vitae Up: Dissertation Previous: E. Coupling to TMA

Bibliography

1
ANSI.
``Information Technology - Programming Languages - C++''.
Technical report, ANSI, 1998.

2
T.J. Bergin and R.G. Gibson.
``History of Programming Languages''.
Addison-Wesley, 1996.

3
J.P. Biersack and W. Eckstein.
``Sputtering Studies with the Monte Carlo Program TRIM.SP''.
Appl.Phys.A, 34:73-94, 1984.

4
T. Binder, K. Dragosits, T. Grasser, R. Klima, M. Knaipp, H. Kosina, R. Mlekus, V. Palankovski, M. Rottinger, G. Schrom, S. Selberherr, and M. Stockinger.
``MINIMOS-NT User's Guide''.
Institut für Mikroelektronik, 1998.

5
W. Bohmayr.
``Simulation der Ionenimplantation in kristalline Siliziumstrukturen''.
Dissertation, Technische Universität Wien, 1996.
(http://www.iue.tuwien.ac.at ).

6
W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, and S. Selberherr.
``Trajectory Split Method for Monte Carlo Simulation of Ion Implantation''.
IEEE Trans.Semiconductor Manufacturing, 8(4):402-407, 1995.

7
G. Booch.
``Object Oriented Design with Applications''.
Benjamin/Cummings, 1990.

8
B.T. Browne and J.J. Miller, editors.
``Numerical Analysis of Semiconductor Devices and Integrated Circuits'', volume I, Dublin, 1979. Boole Press.

9
A. Burenkov, W. Bohmayr, J. Lorenz, H. Ryssel, and S. Selberherr.
``Analytical Model for Phosphorus Large Angle Tilted Implantation''.
In Ryssel and Pichler [49], pages 488-491.

10
D. Champeaux, D. Lea, and P. Faure.
``Object-Oriented System Development''.
Addison Wesley, 1993.

11
O. Dahl and K. Nygaard.
``Simula: An Algol-based simulation language''.
Communications of the ACM, VOLUME=9,Number=9, 1966.

12
A. Dingle and T.H. Hildebrandt.
``Improving C++ Performance Using Temporaries''.
IEEE Computer, pages 31-41, 1998.

13
C. Donnelly and R. Stallman.
``GNU Bison Manual, Version 1.25''.
Free Software Foundation, Cambridge, Mass., 1996.

14
F. Fasching.
``The Viennese Integrated System for Technology CAD Applications-Data Level Design and Implementation''.
Dissertation, Technische Universität Wien, 1994.
(http://www.iue.tuwien.ac.at ).

15
C. Fischer.
``Bauelementsimulation in einer computergestützten Entwurfsumgebung''.
Dissertation, Technische Universität Wien, 1994.
(http://www.iue.tuwien.ac.at ).

16
J.F. Gibbons, W.S. Johnson, and S.W. Mylroie.
``Projected Range Statistics''.
Halstead Press, Strandsberg, 1975.

17
T. Grasser.
``Mixed-Mode Device Simulation''.
Dissertation, Technische Universität Wien, 1999.
(http://www.iue.tuwien.ac.at ).

18
S. Halama.
``The Viennese Integrated System for Technology CAD Applications-Architecture and Critical Software Components''.
Dissertation, Technische Universität Wien, 1994.
(http://www.iue.tuwien.ac.at ).

19
G. Hobler, P. Pichler, and K. Wimmer.
``PROMIS 1.5 User Guide''.
Institut für Mikroelektronik, Technische Universität Wien, 1991.

20
W. Joppich and S. Mijalkovic.
``Multigrid Methods for Process Simulation''.
Springer, Wien, 1993.

21
W. Jüngling.
``ZOMBIE Version 1.1''.
Institut für Allg. Elektrotechnik und Elektronik, TU Wien, 1990.

22
E.F. Krimmel, H. Oppolzer, and H. Runge.
``Transmission Electron Microscopical Imaging of Lateral Implantation Effects Near Mask Edges in B$^+$ Implanted Si Wafers''.
Revue de Physique Appliquee, 13:791-795, 1978.

23
M.E. Law.
``FLOODS/FLOOPS Manual''.
Univeristy of Florida, Department of Electrical Enginieering, 1993.

24
M. Liang and M.E. Law.
``An Object-Oriented Approach to Device Simulation-FLOODS''.
IEEE Trans.Computer-Aided Design, 13(10):1235-1240, 1994.

25
J. Litsios.
``A Modeling Language for Mixed Circuit and Semiconductor Device Simulation''.
Hartung-Gorre, 1996.

26
M. Lutz and D. Ascher.
``Learning Python''.
O'Reilly & Associates, 1999.

27
M. Goto.
``C++ Interpreter - CINT''.
Hewlett-Packard Japan, 1999.

28
M. Goto.
``C++ Interpreter - CINT''.
ftp://root.cern.ch/root/cint5.14.tar.gz , 1999.
email: otom@jpn.hp.com.

29
G. Mayer.
``Anwendung des PIF (Profile Interchange Format) in der Prozeß-und Device-Simulation''.
Diplomarbeit, Technische Universität Wien, 1990.

30
B.J. Mckenzie, C. Yeatman, and L. De Vere.
``Error Repair in Shift-Reduce Parsers''.
ACM Trans.Programming Languages and Systems, 17(4):672-689, 1995.

31
J.S. Moore and G.R. Srinivasan.
``Monte Carlo Simulation of Ion Implantation in Crystalline Silicon Using Marlowe''.
J.Electrochem.Soc., 135(8):2034-2038, 1988.

32
T. J. Mowbray and R. Zahavi.
``The Essential CORBA: Systems Integration Using Distributed Objects''.
John Wiley & Sons, 1995.

33
B.J. Mulvaney, W.B. Richardson, and T.L. Crandle.
``PEPPER - A Process Simulator for VLSI''.
IEEE Trans.Computer-Aided Design, 8(4):336-349, 1989.

34
J.K. Ousterhout.
``Tcl and the Tk Toolkit''.
Addison Wesley, 1994.

35
ParaSoft Corporation.
``Insure++ - A Tool to Support Total Quality Software$^{\mbox{TM}}$''.
http://www.parasoft.com/products/insure/papers/tech.htm , 1999.

36
V. Paxson.
``GNU Flex Manual, Version 2.5.3''.
Free Software Foundation, Cambridge, Mass., 1996.

37
B. Perens.
``Electric Fence''.
http://sunsite.unc.edu/pub/Linux/devel/lang/c/ElectricFence-2.0.5.tar.gz , 1999.
email: Bruce@Pixar.com.

38
Ch. Pichler.
``Integrated Semiconductor Technology Analysis''.
Dissertation, Technische Universität Wien, 1997.
(http://www.iue.tuwien.ac.at ).

39
R. Plasun.
``Optimization of VLSI Semiconductor Devices''.
Dissertation, Technische Universität Wien, 1999.
(http://www.iue.tuwien.ac.at ).

40
H. Puchner.
``Advanced Process Modeling for VLSI Technology''.
Dissertation, Technische Universität Wien, 1996.
(http://www.iue.tuwien.ac.at ).

41
M. Radi.
``Three-Dimensional Simulation of Thermal Oxidation''.
Dissertation, Technische Universität Wien, 1998.
(http://www.iue.tuwien.ac.at ).

42
M. Radi, E. Leitner, E. Hollensteiner, and S. Selberherr.
``AMIGOS: Analytical Model Interface & General Object-Oriented Solver''.
In SISPAD'97 [55], pages 331-334.

43
C.S. Rafferty and R.K. Smith.
``Solving partial differential equations with the prophet simulator'', 1996.
Technical memorandum.

44
Rational Software.
``Purify''.
http://www.rational.com/products/purify_unix/prodinfo/whitepapers/ , 1999.

45
B. Reinisch.
``Eine universelle Eingabeverwaltung für die Steuerung von Simulatoren''.
Diplomarbeit, Technische Universität Wien, 1999.

46
W.B. Richardson, G.F. Carey, and B.J. Mulvaney.
``Modeling Phosphorus Diffusion in Three Dimensions''.
IEEE Trans.Computer-Aided Design, 11(4):487-496, 1992.

47
M. Rottinger.
``Device Simulation Using MINIMOS-NT''.
Dissertation, Technische Universität Wien, 1999.
(http://www.iue.tuwien.ac.at ).

48
J. Rumbaugh, M. Blaha, W. Premerlani, F. Eddy, and W. Lorensen.
``Object-Oriented Modeling and Design''.
Prentice-Hall, 1991.

49
H. Ryssel and P. Pichler, editors.
``Simulation of Semiconductor Devices and Processes'', volume 6, Wien, 1995. Springer.

50
S. Selberherr, W. Fichtner, and H. Pötzl.
``MINIMOS - a Program Package to Facilitate MOS Device Design and Analysis''.
In Browne and Miller [8], pages 275-279.

51
S. Selberherr, W. Hänsch, M. Seavey, and J. Slotboom.
``The Evolution of the MINIMOS Mobility Model''.
Solid-State Electron., 33(11):1425-1436, 1990.

52
J.R. Shewchuk.
``Triangle: Engineering a 2D Quality Mesh Generator and Delaunay Triangulator''.
In Ming C. Lin and Dinesh Manocha, editors, Applied Computational Geometry: Towards Geometric Engineering, number 1148 in Lecture Notes in Computer Science, pages 203-222. Springer-Verlag, 1996.
From the First ACM Workshop on Applied Computational Geometry.

53
J. Siegel.
``Corba Fundamentals and Programming''.
John Wiley & Sons, 1996.

54
T. Simlinger.
``Simulation von Heterostruktur-Feldeffekttransistoren''.
Dissertation, Technische Universität Wien, 1996.
(http://www.iue.tuwien.ac.at ).

55
``Proc. Int. Conf. on Simulation of Semiconductor Processes and Devices'', Cambridge, Massachusetts, 1997.

56
K. Spanderen and Y. Xylander.
``Gut kalkuliert''.
iX, (11/96):166-173, 1996.

57
R. Strasser.
``Rigorous TCAD Investigations on Semiconductor Fabrication Technology''.
Dissertation, Technische Universität Wien, 1999.
(http://www.iue.tuwien.ac.at ).

58
B. Stroustrup.
``The C++ Programming Language''.
Addison-Wesley, 1986.

59
B. Stroustrup.
``The Design and Evolution of C++''.
Addison-Wesley, 1994.

60
Technology Modeling Associates, Inc., Palo Alto, CA.
``TMA TSUPREM-4, Two-Dimensional Process Simulation Program, Version 6.2'', 1995.

61
Technology Modeling Associates, Inc., Sunnyvale, California.
``TMA TSUPREM-4, Two-Dimensional Process Simulation Program, Version 6.5 User's Manual'', 1997.

62
W. Tuppa.
``VMake - A CASE-Oriented Configuration Management Utility''.
Dissertation, Technische Universität Wien, 1996.
(http://www.iue.tuwien.ac.at ).

63
H.A. van der Vorst.
``BI-CGSTAB: A Fast and Smoothly Converging Variant of BI-CG for the Solution of Nonsymmetric Linear Systems''.
SIAM J.Sci.Stat.Comput., 13(2):631-644, 1992.

64
T. Wada and N. Kotani.
``Design and Development of 3-Dimensional Process Simulator''.
IEICE Trans.Electron., E82-C(6):839-847, 1999.

65
L. Wall, T. Christiansen, and R.L. Schwartz.
``Programming Perl''.
O'Reilly & Associates, second edition, 1996.

66
R.G. Wilson.
``The Pearson IV Distribution and Its Application to Ion Implanted Depth Profiles''.
Rad.Eff., 46:141-148, 1980.

67
A.S. Wong and A.R. Neureuther.
``The Intertool Profile Interchange Format: A Technology CAD Environment Approach''.
IEEE Trans.Computer-Aided Design, 10(9):1157-1162, 1991.

68
D.W. Yergeau and R.W. Dutton.
``Alamode: A Layered Model Development Environment for Simulation of Impurity Diffusion in Semiconductors'', 1997.
Documentation for release 97.06.18.



Robert Mlekus
1999-11-14