In this work, an integrated environment for TCAD analysis is presented that intends to support a wide variety of TCAD tasks from tool development and calibration to process flow simulation and design optimization. Special emphasis has been put on using the generic concepts and mechanism found in VISTA (see Section 1.2.1) to support process and device engineering tasks in actual industrial settings. Although a thorough treatment of all aspects of the concepts, design, and implementation is not feasible, the points of main concern are discussed.