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Next: 2.1.11 Process Synthesis Up: 2.1 TCAD Tasks Previous: 2.1.9 Device Matching

2.1.10 Technology Development and Evaluation

At the early stages of the development of a new process technology, unexplored territory has to be probed to limit the number of potential technology alternatives and select the most promising one. Although no accurate calibrations exist at this stage of process development, the existing body of information can be used to extrapolate process characteristics to a new technology or generation [Mas95] [Mar96].



Christoph Pichler
Thu Mar 13 14:30:47 MET 1997