B5. Gauß Function

The Gauß function is frequently used as a simple model for the dopant distribution. The Gauß function is expressed by

$$f(y) = \frac{1}{\sqrt{2 \cdot \pi} \sigma} e^{ \left ( - \frac{ \left ( x - R_p \right )^{2}}{2 \cdot \sigma} \right )}$$ (B8)

where R_p is the projected range and $\sigma$ is the standard deviation.