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Acknowledgements

First and foremost, I would like to thank all members of the Institute for
Microelectronics for the very good working atmosphere. I am very grateful for the continuous support and encouragement by my advisor Professor Siegfried
Selberherr. His decision to offer me a doctoral position at his Institute has played an important role in my professional carrier. I would also like to point out his financial support to attain several exciting international conferences all over the world. Due to his excellent contacts to the semiconductor industry he was able to support me with an outstanding working environment. During the four years at the Institute I enjoyed four generations of workstations which demonstrates the ongoing hardware progress at the Institute.

I would like to thank the research laboratories of Siemens AG, Munich, for
granting me a scholarship. Without this support this work would not have been realized.

I wish to thank Sheldon Aronowitz from LSI Logic Corp. for inviting me to work in his group. I greatly appreciated this opportunity to gain my knowledge in a team of excellent co-workers like Laique Khan, Paul Neary and Joeffrey Dong.

Special acknowledge to my sysadmin-mates Franz Fasching, Walter Tuppa,
Rudi Strasser and Rainer Sabelka for sharing many system-administratorial work during the last years. Hans Kosina, Gerhard Schrom and Heinrich Kirchauer thanks for proof-reading this work.

My sincere gratitude to Claus Fischer and Thomas Simlinger for supporting me during the development of PROMIS-NT.

Last but not least, I wish to express my sincere gratitude to my family and Sonja's family for continuous support. On the very top of all those I owe more than can expressed is Sonja Koppensteiner for many hours of fruitful technical and non-technical discussions to shape my personal attitudes in many respects.



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