10.4.1 Analysis Capabilities

Although it is possible to perform statistical analysis with SIESTA in its current state, a lot of work remains still to be done in this area. One could think of features which are able to automatically detect correlations between fabrication parameters and device parameters, or of a setup which is able to generate scattering plots of fabrication data. Such features could help engineers to enhance the yield of an IC fabrication process by means of TCAD.