2.3 Ferroelectric Gate Stacks

Ferroelectric materials are vital for a huge field of applications. In form of thin-films, ferroelectrics, or in a more general sense polar materials, have been exploited in RF devices, non-volatile memories, various sensors and actuators, and for tunable microwave devices[97]. The development of ferroelectric films dates back to the late $1960$s and early $1970$s triggered by progress in integrated silicon devices and thin film processing techniques raising interest in ferroelectric thin films for non-volatile memories[98,99,100].