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Publications Christoph Lenz

12 records

Publications in Scientific Journals

4.   Souza Berti Rodrigues, F., Aguinsky, L. F., Lenz, C., Hössinger, A., Weinbub, J. (2023).
3D Modeling of Feature-Scale Fluorocarbon Plasma Etching in Silica.
Journal of Computational Electronics, 22(5), 1558–1563. https://doi.org/10.1007/s10825-023-02068-y (reposiTUm)

3.   Lenz, C., Aguinsky, L. F., Hössinger, A., Weinbub, J. (2023).
A Complementary Topographic Feature Detection Algorithm Based on Surface Curvature for Three-Dimensional Level-Set Functions.
Journal of Scientific Computing, 94(3), 1–21. https://doi.org/10.1007/s10915-023-02133-5 (reposiTUm)

2.   Lenz, C., Manstetten, P., Aguinsky, L. F., Rodrigues, F., Hössinger, A., Weinbub, J. (2023).
Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations.
Solid-State Electronics, 200, Article 108534. https://doi.org/10.1016/j.sse.2022.108534 (reposiTUm)

1.   Lenz, C., Toifl, A., Quell, M., Rodrigues, F., Hössinger, A., Weinbub, J. (2022).
Curvature Based Feature Detection for Hierarchical Grid Refinement in TCAD Topography Simulations.
Solid-State Electronics, 191(108258), 108258. https://doi.org/10.1016/j.sse.2022.108258 (reposiTUm)

Contributions to Books

1.   Lenz, C., Scharinger, A., Manstetten, P., Hössinger, A., Weinbub, J. (2021).
A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes.
In M. van Beurden, N. Budko, W. Schilders (Eds.), Scientific Computing in Electrical Engineering (pp. 73–81). Springer. https://doi.org/10.1007/978-3-030-84238-3_8 (reposiTUm)

Talks and Poster Presentations (with Proceedings-Entry)

5.   Lenz, C., Manstetten, P., Hössinger, A., Weinbub, J. (2022).
Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations.
In SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet (pp. 117–118), Granada, Spain. (reposiTUm)

4.   Lenz, C., Toifl, A., Hössinger, A., Weinbub, J. (2021).
Curvature Based Feature Detection for Hierarchical Grid Refinement in TCAD Topography Simulations.
In 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS). https://doi.org/10.1109/eurosoi-ulis53016.2021.9560690 (reposiTUm)

3.  C. Lenz, A. Toifl, A. Hössinger, J. Weinbub:
"Curvature-Based Feature Detection for Hierarchical Grid Refinement in Epitaxial Growth Simulations";
Talk: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Caen, France; 2021-09-01 - 2021-09-03; in: "Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", (2021), 109 - 110.

2.   Lenz, C., Scharinger, A., Quell, M., Manstetten, P., Hössinger, A., Weinbub, J. (2021).
Evaluating Parallel Feature Detection Methods for Implicit Surfaces.
In Book of Abstracts of the Austrian-Slovenian HPC Meeting (ASHPC) (p. 31), Maribor, Slovenia. (reposiTUm)

1.   Lenz, C., Scharinger, A., Hössinger, A., Weinbub, J. (2020).
A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes.
In Book of Abstracts of the International Conferences on Scientific Computing in Electrical Engineering (SCEE) (pp. 99–100), Eindhoven, Netherlands. (reposiTUm)

Doctor's Theses (authored and supervised)

1.   Lenz, C. (2023).
Hierarchical Grid Algorithms for Topography Simulation
 Technische Universität Wien. https://doi.org/10.34726/hss.2023.115141 (reposiTUm)

Diploma and Master Theses (authored and supervised)

1.   Lenz, C. (2019).
Curvature Based Surface Mesh Simplification
 Technische Universität Wien. https://doi.org/10.34726/hss.2019.43658 (reposiTUm)