Publications Paul Manstetten

33 records

Books and Editorships

1.   Weinbub, J., Manstetten, P., Goodnick, S. (Eds.). (2019).
Book of Abstracts of the Workshop on High Performance TCAD.
Institute for Microelectronics, TU Wien. (reposiTUm)

Publications in Scientific Journals

6.   Lenz, C., Manstetten, P., Aguinsky, L. F., Rodrigues, F., Hössinger, A., Weinbub, J. (2023).
Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations.
Solid-State Electronics, 200, Article 108534. https://doi.org/10.1016/j.sse.2022.108534 (reposiTUm)

5.   Aguinsky, L. F., Wachter, G., Manstetten, P., Rodrigues, F., Trupke, M., Schmid, U., Hössinger, A., Weinbub, J. (2021).
Modeling and Analysis of Sulfur Hexafluoride Plasma Etching for Silicon Microcavity Resonators.
Journal of Micromechanics and Microengineering, 31(12), 125003. https://doi.org/10.1088/1361-6439/ac2bad (reposiTUm)

4.   Toifl, A., Quell, M., Klemenschits, X., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2020).
The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy.
IEEE Access, 8, 115406–115422. https://doi.org/10.1109/access.2020.3004136 (reposiTUm)

3.   Gnam, L., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2018).
Accelerating Flux Calculations Using Sparse Sampling.
Micromachines, 9(11), 1–18. https://doi.org/10.3390/mi9110550 (reposiTUm)

2.   Manstetten, P., Filipovic, L., Hössinger, A., Weinbub, J., Selberherr, S. (2017).
Framework to Model Neutral Particle Flux in Convex High Aspect Ratio Structures Using One-Dimensional Radiosity.
Solid-State Electronics, 128, 141–147. https://doi.org/10.1016/j.sse.2016.10.029 (reposiTUm)

1.   Manstetten, P., Weinbub, J., Hössinger, A., Selberherr, S. (2017).
Using Temporary Explicit Meshes for Direct Flux Calculation on Implicit Surfaces.
Procedia Computer Science, 108, 245–254. https://doi.org/10.1016/j.procs.2017.05.067 (reposiTUm)

Contributions to Books

4.   Lenz, C., Scharinger, A., Manstetten, P., Hössinger, A., Weinbub, J. (2021).
A Novel Surface Mesh Simplification Method for Flux-Dependent Topography Simulations of Semiconductor Fabrication Processes.
In M. van Beurden, N. Budko, W. Schilders (Eds.), Scientific Computing in Electrical Engineering (pp. 73–81). Springer. https://doi.org/10.1007/978-3-030-84238-3_8 (reposiTUm)

3.   Quell, M., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2020).
Parallelized Construction of Extension Velocities for the Level-Set Method.
In R. Wyrzykowski, E. Deelman, J. Dongarra, K. Karczewski (Eds.), Parallel Processing and Applied Mathematics (pp. 348–358). Springer International Publishing. https://doi.org/10.1007/978-3-030-43229-4_30 (reposiTUm)

2.   Gnam, L., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2019).
Accelerating Flux Calculations Using Sparse Sampling.
In L. Filipovic, T. Grasser (Eds.), Miniaturized Transistors (pp. 176–192). MDPI. https://doi.org/10.3390/mi9110550 (reposiTUm)

1.   Manstetten, P., Gnam, L., Hössinger, A., Selberherr, S., Weinbub, J. (2018).
Sparse Surface Speed Evaluation on a Dynamic Three-Dimensional Surface Using an Iterative Partitioning Scheme.
In Y. Shi, H. Fu, Y. Tian, V. V. Krzhizhanovskaya, M. H. Lees, J. Dongarra, P. M. A. Sloot (Eds.), Lecture Notes in Computer Science (pp. 694–707). Springer International Publishing. https://doi.org/10.1007/978-3-319-93698-7_53 (reposiTUm)

Talks and Poster Presentations (with Proceedings-Entry)

19.   Lenz, C., Manstetten, P., Hössinger, A., Weinbub, J. (2022).
Automatic Grid Refinement for Thin Material Layer Etching in Process TCAD Simulations.
In SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet (pp. 117–118), Granada, Spain. (reposiTUm)

18.   Lenz, C., Scharinger, A., Quell, M., Manstetten, P., Hössinger, A., Weinbub, J. (2021).
Evaluating Parallel Feature Detection Methods for Implicit Surfaces.
In Book of Abstracts of the Austrian-Slovenian HPC Meeting (ASHPC) (p. 31), Maribor, Slovenia. (reposiTUm)

17.   Scharinger, A., Manstetten, P., Hössinger, A., Weinbub, J. (2020).
Generative Model Based Adaptive Importance Sampling for Flux Calculations in Process TCAD.
In 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Tokyo, Japan. https://doi.org/10.23919/sispad49475.2020.9241615 (reposiTUm)

16.   Gnam, L., Manstetten, P., Quell, M., Rupp, K., Selberherr, S., Weinbub, J. (2019).
A Flexible Shared-Memory Parallel Mesh Adaptation Framework.
In 2019 19th International Conference on Computational Science and Its Applications (ICCSA), Trieste, Italy. https://doi.org/10.1109/iccsa.2019.00016 (reposiTUm)

15.   Aguinsky, L., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2019).
A Mathematical Extension to Knudsen Diffusion Including Direct Flux and Accurate Geometric Description.
In Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN 2019) (pp. 109–110), Evanston, IL, United States. (reposiTUm)

14.   Aguinsky, L., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2019).
An Extended Knudsen Diffusion Model for Aspect Ratio Dependent Atomic Layer Etching.
In Abstracts of the International Conference on Atomic Layer Deposition (ALD) Featuring the International Workshop on Atomic Layer Etching (ALE) (p. 109), Bellevue, WA, USA. (reposiTUm)

13.   Hössinger, A., Manstetten, P., Diamantopoulos, G., Quell, M., Weinbub, J. (2019).
High Performance Computing Aspects in Semiconductor Process Simulation.
In Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD) (pp. 3–4), Chicago, IL, USA. (reposiTUm)

12.   Manstetten, P., Diamantopoulos, G., Gnam, L., Aguinsky, L., Quell, M., Toifl, A., Scharinger, A., Hössinger, A., Ballicchia, M., Nedjalkov, M., Weinbub, J. (2019).
High Performance TCAD: From Simulating Fabrication Processes to Wigner Quantum Transport.
In Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD) (p. 13), Chicago, IL, USA. (reposiTUm)

11.   Manstetten, P., Aguinsky, L., Selberherr, S., Weinbub, J. (2019).
High-Performance Ray Tracing for Nonimaging Applications.
In Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD) (p. 20), Chicago, IL, USA. (reposiTUm)

10.   Quell, M., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2019).
Parallelized Construction of Extension Velocities for the Level-Set Method.
In Proceedings of the International Conference on Parallel Processing and Applied Mathematics (PPAM) (p. 42), Bialystok, Poland. (reposiTUm)

9.   Klemenschits, X., Manstetten, P., Filipovic, L., Selberherr, S. (2019).
Process Simulation in the Browser: Porting ViennaTS Using WebAssembly.
In 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Udine, Italy. https://doi.org/10.1109/sispad.2019.8870374 (reposiTUm)

8.   Diamantopoulos, G., Manstetten, P., Gnam, L., Simonka, V., Aguinsky, L., Quell, M., Toifl, A., Hössinger, A., Weinbub, J. (2019).
Recent Advances in High Performance Process TCAD.
In CSE19 Abstracts (p. 335), Atlanta, GA, USA. (reposiTUm)

7.   Aguinsky, L., Manstetten, P., Hössinger, A., Selberherr, S., Weinbub, J. (2019).
Three-Dimensional TCAD for Atomic Layer Processing.
In Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD) (p. 5), Chicago, IL, USA. (reposiTUm)

6.   Gnam, L., Manstetten, P., Selberherr, S., Weinbub, J. (2018).
Comparison of High-Performance Graph Coloring Algorithms.
In Proceedings of the Vienna Young Scientists Symposium (pp. 30–31), Wien, Austria. (reposiTUm)

5.   Manstetten, P., Hössinger, A., Weinbub, J., Selberherr, S. (2017).
Accelerated Direct Flux Calculations Using an Adaptively Refined Icosahedron.
In 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kamakura, Japan. https://doi.org/10.23919/sispad.2017.8085267 (reposiTUm)

4.   Manstetten, P., Simonka, V., Diamantopoulos, G., Gnam, L., Makarov, A., Hössinger, A., Weinbub, J. (2017).
Computational and Numerical Challenges in Semiconductor Process Simulation.
In CSE17 Abstracts (p. 46), Atlanta, GA, USA. (reposiTUm)

3.   Manstetten, P., Filipovic, L., Hössinger, A., Weinbub, J., Selberherr, S. (2016).
Modeling Neutral Particle Flux in High Aspect Ratio Holes Using a One-Dimensional Radiosity Approach.
In Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (pp. 68–69), Bologna, Italy. (reposiTUm)

2.   Manstetten, P., Filipovic, L., Hössinger, A., Weinbub, J., Selberherr, S. (2016).
Using One-Dimensional Radiosity to Model Neutral Particle Flux in High Aspect Ratio Holes.
In 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS). https://doi.org/10.1109/ulis.2016.7440067 (reposiTUm)

1.   Manstetten, P., Filipovic, L., Hössinger, A., Weinbub, J., Selberherr, S. (2016).
Using One-Dimensional Radiosity to Model Neutral Flux in Convex High Aspect Ratio Structures.
In 2016 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Nuremberg, Germany. https://doi.org/10.1109/sispad.2016.7605198 (reposiTUm)

Talks and Poster Presentations (without Proceedings-Entry)

2.   Manstetten, P. (2018).
Performance Improvements for Advanced Physical Etching and Deposition in Memory Technologies.
Silvaco Users Global Event (SURGE), Santa Clara, CA, USA - virtual, Non-EU. (reposiTUm)

1.   Ullmann, B., Grill, A., Manstetten, P., Jech, M., Kampl, M., Zisser, W., Filipovic, L., Thesberg, M., Rudolf, F., Windbacher, T., Cervenka, J., Katterbauer, M., Weinbub, J. (2016).
Ihr Smartphone - Ein Supercomputer Vor 20 Jahren. Ein Einblick in Die Mikro- Und Nanoelektronik.
Lange Nacht der Forschung 2016, Wien, Austria. (reposiTUm)

Doctor's Theses (authored and supervised)

1.   Manstetten, P. L. (2018).
Efficient Flux Calculations for Topography Simulation
Technische Universität Wien. https://doi.org/10.34726/hss.2018.57263 (reposiTUm)