|Project Number||E8150 PROMPT|
|Start of Project||1. February 1994|
|End of Project||30. June 1996|
The aim of the PROMPT project was the development of an engineering program system suitable to provide appropriate input (topography, doping) for three-dimensional device simulation.
The main tasks for the development of a multi-dimensional process simulation system were:
• the compilation of three-dimensional profiles from one-dimensional, two-dimensional, and three-dimensional process simulation.
• the use of existing one-dimensional and two-dimensional programs.
• the development of new three-dimensional simulation modules.