|Principal Investigator||Tibor Grasser|
|Scientific Fields||2521, Mikroelektronik|
|Keywords||simulation, memory, carrier transport in semiconductors, thermal properties, reliability analysis|
Infineon Technologies AG
|Start of Project||1. January 2003|
|End of Project||31. December 2010|
The Christian Doppler Laboratory for Technology CAD in Microelectronics focuses mainly on the simulation of the electrical characteristics of modern semiconductor devices. In order to master this task, sophisticated software tools are required, commonly referred to as TCAD tools. Despite the advances made during the last decades, many unresolved issues remain. In particular, the capabilities of commercially available TCAD tools usually lag behind for leading edge applications. This is mainly due to the rapid progress in process technology which enabled the fabrication of extremely small devices, the realization of new device concepts based on quantum mechanical effects, and the introduction of new materials. All these innovations question the reliability of trusted simulation tools and a reassessment, evaluation, and refinement is mandatory.