Projects Details

Advanced Developments for 0.25µm CMOS Technologies

  
Project Number E7236 ADEQUAT   
Start of Project 31. July 1992
End of Project 30. January 1994
Additional Information Entry in CORDIS

Abstract

The objectives of the ADEQUAT project were
(1) to develop basic process steps and process modules for the next two CMOS generations (0.35µm and 0.25µm) for logic applications;
(2) to demonstrate the feasibility of process modules, and to optimize their characteristics in CMOS process batches;
(3) to transfer the process know-how to industrial pilot lines.

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