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Paul Manstetten, Lado Filipovic, Andreas Hössinger, Josef Weinbub, Siegfried Selberherr

Using One-Dimensional Radiosity to Model Neutral Flux in Convex High Aspect Ratio Structures Inproceedings

Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), pp. 265 - 268, 2016, ISBN: 978-1-5090-0817-9.

Links | BibTeX | Tags: High Aspect Ratio, Neutral Particle Flux, Plasma Etching, Poster, SISPAD