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    Doctoral Thesis Defense

    29 November 2022

    Luiz Felipe Aguinsky, MSc will defend his thesis on December 20th.

    Luiz Felipe Aguinsky, MSc

    Time: Tuesday, December 20th, 2022, 14:00

    Place: Videoconference

    Title: Phenomenological Modeling of Reactive Single-Particle Transport in Semiconductor Processing

    Doctoral Dissertation Committee:

    Committee Chair:

    • Assoc. Prof. Dr. Johann Auer (TU Wien, Austria)

    Supervisor and Examiner:

    • Assoc. Prof. Dr.  Josef Weinbub / E 360 (TU Wien, Austria)   

    Examiner:

    • Univ. Prof. Dr. Ulrich Schmid  (TU Wien, Austria)   
    • Prof. Mark Law, PhD (University of Florida, USA)

    Institute for Microelectronics
    Head: Univ. Prof. Dipl.-Ing. Dr. techn. Tibor Grasser
    Deputy Head: O. Univ. Prof. Dipl.-Ing. Dr. techn. Dr.h.c. Siegfried Selberherr
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