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    "Electromigration-induced void evolution and failure of Cu/SiCN hybrid bonds" Paper

    09 March 2023

    Journal of Applied Physics paper highlighted by Editors

    We are proud to announce that a recently published paper in the 133rd volume of the Journal of Applied Physics, titled "Electromigration-induced void evolution and failure of Cu/SiCN hybrid bonds" has been selected as an Editor's Pick. In the paper, a novel modeling approach for analysis of electromigration-induced void dynamics in Cu/SiCN wafer-to-wafer hybrid bonds is presented.  Since most three-dimensional system-on-chip integration technology schemes require a wafer-to-wafer bonding approach, our method is expected to contribute to the reliability of three-dimensional integrated circuits.

    This work has been performed in cooperation with imec, Belgium, and contributions from our colleagues Hajdin, Roberto, and Siegfried.

    Congratulations to all co-authors!

    Institute for Microelectronics
    Head: Univ. Prof. Dipl.-Ing. Dr. techn. Tibor Grasser
    Deputy Head: O. Univ. Prof. Dipl.-Ing. Dr. techn. Dr.h.c. Siegfried Selberherr
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