The continued Power-Performance-Area-and-Cost scaling, formerly known as “More Moore”, predicts a paradigm change towards the 3D sequential integration of nanosized structures. However, entering the nano world also means that classical continuum tools such as technology-computer aided design (TCAD) are insufficient and lose their predictivity. Therefore, new tools need to be developed which are able to take new materials, technologies and device architectures into account. Together with dedicated experimental investigations, new models based on (lattice) kinetic monte carlo tools will be developed which ultimately leads to a calibrated toolchain for a virtual fabrication of 3D sequentially integrated nanoscaled devices.
This project is financially supported by the European Commission (EC).
More information: here.