%PDF-1.4
%
1 0 obj
<>stream
application/pdfIEEEIEEE Access;2020;8; ;10.1109/ACCESS.2020.3004136Crystallographic etchingnon-planar epitaxial growthlevel-set methodnon-convex Hamiltonianmulti-material simulationThe Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy
IEEE Access115406 2020810.1109/ACCESS.2020.3004136115422
endstream
endobj
2 0 obj
<>
endobj
3 0 obj
<>
endobj
4 0 obj
<>
endobj
5 0 obj
<>/ProcSet[/PDF/Text]/ColorSpace<>/Font<>>>/MediaBox[0 0 576 782.929]/Annots[19 0 R 20 0 R 21 0 R 22 0 R 23 0 R 24 0 R 25 0 R 26 0 R 27 0 R 28 0 R 29 0 R 30 0 R 31 0 R 32 0 R 33 0 R 34 0 R 35 0 R 36 0 R 37 0 R 38 0 R 39 0 R 40 0 R 41 0 R 42 0 R 43 0 R 44 0 R 45 0 R 46 0 R 47 0 R]/Rotate 0>>
endobj
48 0 obj
<>
endobj
50 0 obj
<>
endobj
49 0 obj
[780 337 786 542 780 493 780 780 800 800 800 800 800 1000 500 582 780 780 780 780 754 754 754 754 780 780 780 780 984 984 754 754 1099 1099 604 604 1044 989 989 780 1043 1043 704 704 1044 989 989 762 297 1021 629 629 784 784 0 0 556 519 722 556 736 635 780 780 771 425 452 780 780 451 536 536 780 421 347 333 333 333 333 333 333 333 333 730 348 348 333 333 721 776 776 668 668 668 700 700 662 662 469 469 469 469 370 370 410 410]
endobj
51 0 obj
<>stream
xڍTy4QNd38}~u]\}?cnzfT
Cl܌
!G Q)&Xt #&4Qh=8B!(TD6I
iDQMXRp04C8
ʒC`<
\jRO <CRw+z{3&d%X?h,"%2\q29K( bx{#>X?A: TheP:Z9!(_HήV&k`ZDfEF{ͫ woh|;,S
_iӱA0JS[A/5 Y:*1a[ hRt,d@Ɗ/N?y~'1GSQ re
w~ bbI?$CGfW; I9Q8 ~u^ Ǥy.o>タ ^>DW/Y&s?\jE*j3~4z]V]p*Nb5!/;|5gNTIL=nϨFA3F\rM\LEFg$!>2N' [?e9pV`7#
Gfx-E3l)aǶR5]c./Jw7^~S@o8QZ~-9͆=G~,(@QLyb-W Xsic! G=8|>0B9{^Q䙇o;WT
0'<,/m?G+$AUQXecX0lEVm
e2hWݫ^Dò4,fե{qt-OIn.;G {9a2v ;Oz80TA+zZ5[^t]!ARRօjCKypFy}x~ Ȋ=}{oz$EĔL8&GKn%$1o: 29K!\O^X\ 7n
EEk~T㝓>(Yj
JrZ :3f36)`%AhfBKl;[1ze?\Se?/
S(/Ӥ2qVw
=|q7(WfӒՂ nki/szq"q xne@L-b 0:(C =hvMw7.;=6~ t/_5)/ Vo͗xb-WP-657-Q>c%\gΟ6`lq05l78|
atҾ ϗ1wYʻR[so6Se80F8Yb^/5ڇNREc%"\p%D0B BNc4w*CnE臭o,5&sNMRlP_j+dVH:a{ⅫRW+/%wd9Osȓµ Цz/
X+8}w!ΚK$^\LV &eم
4BG^-
zJio7ulRvCqP ۜAQavckS/7e䩿LAmzE
J#L~<b#?>KnOsAC:cɖX#^9:}Dk}&yOW(>N'n~'O䉩nHd(d_;ikx?v*4A7j};+Zu*ېN6n3wr;QIud*PFs\;ʮimL'[P[ǝ?5&
endstream
endobj
52 0 obj
<>/Rect[519.587 204.62 531.542 215.521]/H/I>>
endobj
53 0 obj
<>
endobj
54 0 obj
[/View/Design]
endobj
55 0 obj
<>>>
endobj
56 0 obj
<>/ProcSet[/PDF/Text]/ColorSpace<>/Font<>>>/MediaBox[0 0 576 782.929]/Rotate 0>>
endobj
57 0 obj
<>
endobj
58 0 obj
<>stream
HWI+VLzGs2^stͽ7t=IKC5պzolqh[˥ײkM'{ɭg=grޔ}w{f&^~Er7+8v|o$BmH"3It:G'3X5i%QPds $\˕DC4:=xZ{kK%Jhuo
]=y\9ʥ0E՝/xYh'](փprwVwHwTR4a[8`Aabngeq^^(ӟÆ>́%n7(y>]Pwg#˪КIZ9K\^@T/X0A=Nѣo&J
K}
ɐO/iP:'q)|0s"ǐOZ|\r> Rw}g+ɠ\W)2q6+2w퇕XioÕBsieUG̯Nb_ )LFPžKc^ᗕ CHF
;H$@Ѩֽ8G@3g,+.p}jiH}:Ev]n; u5+aB8l#|!Y7#:e'n0Ig 蓅]"pD^ؓ|)u^1bpb~
X.?&jp>@W,\Op)uͤPFKG=2HcRbIn/Uj8*g"Q,
w\ij)rҵ)X1O]C$r7]M[ok_Vnȃ$w(Ȓ5|ɡ'ыA!x,dfV!ch;
3nFѲw7N T ɉ(Zai"}pD 6!).H=eLVצ?7Ԅ7 f ((wGQfu=xKt3m,/,Zm6!7μf r-.,3I-nz_'(O@gmKxXU:S[*&0½EQ2;(c1ttKKjy#r/ b㜪O\ӭ L'I*ba[z0P
4S@{WBOqGrjr1VU.dm6g2/