%PDF-1.4
%
1 0 obj
<>stream
application/pdfIEEEIEEE Transactions on Electron Devices;2021;68;11;10.1109/TED.2021.3087451Parallel Velocity Extension for Level-Set-Based Material Flow on Hierarchical Meshes in Process TCADHierarchical mesheslevel-set methodmaterial flow processparallel algorithmprocess technology computer-aided design (TCAD)shared-memorythermal oxidationvelocity extensionMichael QuellVasily SuvorovAndreas HossingerJosef Weinbub
IEEE Transactions on Electron Devices5430 Nov. 20211110.1109/TED.2021.3087451685437
VoR
endstream
endobj
2 0 obj
<>
endobj
3 0 obj
<>stream
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