3.4 Dielectric and Thermal Properties

The dielectric permittivity ( $ \varepsilon$) of a material is the ratio of the electric displacement to the electric field strength, $ D/E$. In an isotropic material, $ D$ and $ E$ are parallel and $ \varepsilon$ is a scalar, but in anisotropic materials $ \varepsilon$ is a rank-2 tensor. It can also be defined as a dimensionless relative permittivity, or dielectric constant, normalized to the absolute vacuum permittivity $ \varepsilon_0$. However, at high frequencies, it is no longer constant, and decreases with increasing frequency.


Thermal conductivity ($ \kappa$) is a property of materials that expresses the heat flux through the material if a certain temperature gradient exists over the material. The thermal conductivity in $ \alpha $-SiC has also anisotropic properties. The high thermal conductivity of SiC allows high power densities in a device.
Subsections T. Ayalew: SiC Semiconductor Devices Technology, Modeling, and Simulation