5.3 Determination of the Parameter Set for the Simulation
In the following section the geometrical setup and the transport models described above will be used. The epitaxial and geometrical structure of a HEMT is described in Chapter 2. It represents the nominal device design. However, the structure of the actual device after the process is known only with a certain accuracy. The impact of the deviations of parameters from the nominal values on the device performance has to be identified in order to determine the most critical parameters for the simulation. Then the fitting procedure to find a suitable parameter set for the geometry and the physical models will be described.
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Helmut Brech 1998-03-11