List of Abbreviations and Acronyms

nMOS ... n-type MOS
pMOS ... p-type MOS
BTE ... BOLTZMANN's transport equation
CMOS ... Complementary MOS
CNT ... Carbon nanotube
CSB ... Central shutter barrier
CV ... Capacitance-voltage
DIBL ... Drain-induced barrier lowering
DRAM ... Dynamical RAM
ECB ... Electrons from the conduction band
EED ... Electron energy distribution
EEPROM ... Electrically erasable programmable read-only memory
EOT ... Effective oxide thickness
EVB ... Electrons from the valence band
FET ... Field-effect transistor
FN ... FOWLER-NORDHEIM
FWHM ... Full-width half-maximum
HED ... Hole energy distribution
HVB ... Holes from the valence band
ITRS ... International Technology Roadmap for Semiconductors
IV ... Current-voltage
LDD ... Lightly doped drain
MOCVD ... Metal-organic chemical vapor deposition
MOS ... Metal-oxide-semiconductor
MPU ... Microprocessor unit
MOSFET ... MOS field-effect transistor
NEGF ... Non-equilibrium GREEN's function

NTRS ... National Technology Roadmap for Semiconductors
NVM ... Non-volatile memory
PIF ... PROFILE INTERCHANGE FORMAT
PLEDM ... Planar localized-electron device memory
PLEDTR ... Planar localized-electron device transistor
QTBM ... Quantum transmitting boundary method
QBS ... Quasi-bound state
RAM ... Random-access memory
RTA ... Relaxation-time approximation
SIA ... Semiconductor Industry Association
SILC ... Stress-induced leakage current
SIMS ... Secondary ion mass spectroscopy
SOI ... Silicon on insulator
SONOS ... Silicon-oxide-nitride-oxide-silicon
SRAM ... Static random-access memory
STI ... Shallow trench isolation
TAT ... Trap-assisted tunneling
TCAD ... Technology computer-aided design
TEM ... Transmission electron microscopy
TM ... Transfer matrix
WKB ... WENTZEL-KRAMERS-BRILLOUIN
WSS ... WAFER-STATE SERVER

A. Gehring: Simulation of Tunneling in Semiconductor Devices