Dissertation Stefan Holzer

D I S S E R T A T I O N

Optimization for Enhanced Thermal Technology CAD Purposes

ausgeführt zum Zwecke der Erlangung des akademischen Grades
eines Doktors der technischen Wissenschaften

eingereicht an der Technischen Universität Wien
Fakultät für Elektrotechnik und Informationstechnik

von

STEFAN HOLZER

Tokiostraße 10/2/28
1220 Wien

Matrikelnummer 9525914
geboren am 18. Januar 1976 in Wien

Wien, im Juni 2007

Abstract
Kurzfassung
Acknowledgments
Contents
List of Physical Constants
Notations
List of Acronyms
List of Chemical Symbols
1. Introduction
- 1.1 Challenges Discussed in this Thesis
- 1.2 The ITRS and MOORE's Law
- 1.3 Electrical and Physical Properties
- 1.4 Thermal Properties and Power Density
- 1.5 Challenges
  - Approaches
2. Thermal Effects in Semiconductor Devices
- 2.1 Temperature
- 2.2 Heating Phenomena
- 2.3 Material Properties
  - 2.3.1 Interconnect Materials
  - 2.3.2 Polycrystalline Materials
- 2.4 Material Deposition
3. Thermal Models
- 3.1 Electrical Conductivity
- 3.2 Electrical Permittivity
- 3.3 Thermal Conductivity
- 3.4 Heat Capacitance
- 3.5 Volume Expansion
- 3.6 Mechanical Stress
- 3.7 Interconnect Reliability
  - 3.7.1 Electro-Migration
  - 3.7.2 Mean Time To Failure
4. Optimization for Technology CAD
- 4.1 Basic Issues on Optimization
  - 4.1.1 Optimization Loop
  - 4.1.2 Industrial Requirements
- 4.2 Optimization Strategies
- 4.3 State-of-the-art in Optimization
- 4.4 Challenges in Optimization
- 4.5 Optimization Framework SIESTA
  - 4.5.1 Parallelization Strategy
  - 4.5.2 Simulation Tools
5. Applications
- 5.1 Calibration of Trenches
- 5.2 Parameter Extraction of a Fusing Structure
- 5.3 Applied Optimized Parameters
  - 5.3.1 Thermal Analysis of a Multi-Layered Interconnect Structure
  - 5.3.2 Interconnect Structure Subjected to Mechanical Stress
6. Conclusions
- 6.1 Temperature as a Limiting Factor
- 6.2 Multiple (Thermal) Redundancy
- 6.3 New Materials and New Devices Structures
- 6.4 Outlook
A. Mathematical Notes
- A.1 Convexity of Sets and Domains
- A.2 Voigt Notation
- A.3 Norms
  - A.3.1 Definition
  - A.3.2 Special Norms
- A.4 Aspect Ratio
B. Timing
- B.1 Duty Cycle
- B.2 Delay Times
Bibliography
Own Publications
Curriculum Vitae
About this document ...

Stefan Holzer 2007-11-19