List of Acronyms

ALD	...	Atomic layer deposition
CAD	...	Computer aided design
CNT	...	Carbo-Nanotube
CORBA	...	Common Object Request Broker Architecture
CPU	...	Central processing unit
CVD	...	Chemical vapour deposition
COO	...	Cost of ownership
DD	...	Drift Diffusion
DNA	...	Deoxyribonucleic acid
ELK	...	Extreme low-$\kappa$
ELSA	...	Enhanced Level-Set Applications
EOT	...	Effective oxide thickness
FET	...	Field effect transistor
Gb	...	Gigabit
GB	...	Gigabyte
GHz	...	Gigahertz
GUI	...	Graphical user interface
ILD	...	Interlayer dielectric
IPD	...	Inputdeck language
IT	...	Information Technoloy
ITRS	...	International Technology Roadmap for Semiconductors
LPCVD	...	Low pressure chemical vapour deposition
MC	...	Monte Carlo
MTTF	...	Mean time to failure
MILP	...	Mixed integer linear programming
n-Si	...	n-doped Silicon
NFS	...	Network file system
NTC	...	Negative temperature coefficient
OSG	...	Organo-silcate glass
p-Si	...	p-doped Silicon
poly	...	polycrystalline
${\mathrm{polySi}}$	...	polycrystalline Silicon
PTC	...	Positive temperature coefficient
PTFE	...	Polytetrafluoroethylene
PZT	...	Lead Zirkonium Titanate ${\mathrm{Pb(Ti,Zr)O_3}}$
RE	...	Rare earth elements, member of the lanthanoide group {La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu}
RTD	...	Resonant tunneling diode
SEILIB	...	Simulation Environment Interaction Library
SEM	...	Scanning electron microscopy
SIESTA	...	Simulation Environment for Semiconductor Technology Analysis
TCAD	...	Technology computer aided design
TEM	...	Transmission electron microscopy
TEOS	...	Tetra-ethoxy-silane, Tetra-ethyl-ortho-silicate: ${\mathrm{Si(C_2H_5O)_4}}$
VLSI	...	Very large scale integration
WSS	...	Wafer-State-Server: File format for distributed quantities
XML	...	Extensible markup language