D I S S E R T A T I O N

Characterization and Modeling of
Charged Defects in Silicon and 2D Field-Effect Transistors

ausgeführt zum Zwecke der Erlangung des akademischen Grades
eines Doktors der technischen Wissenschaften

eingereicht an der Technischen Universität Wien
Fakultät für Elektrotechnik und Informationstechnik
von

Yury Illarionov

Grunbergstraβe 19-21/2/10
A-1120 Wien, Österreich

geboren am 5. Juni 1988 in Leningrad, USSR

Wien, im December 2015      

Abstract
Zusammenfassung
Acknowledgement
Contents
1 Introduction
2 Charged Carrier Transport and Single Defects in Si FETs
 2.1 Charged Carrier Transport: General Equations and Models
 2.2 Modeling of Random Dopants and Discrete Traps
 2.3 Characterization of Preexisting Defects Using Time-Dependent Defect Spectroscopy
3 Main Reliability Issues in Si MOSFETs and Their Modeling
 3.1 Overview of Reliability Issues
 3.2 Modeling of BTI in Si MOSFETs
4 Next Generation FETs Based on 2D Materials
 4.1 Overview of 2D Materials: Graphene, MoS2 and Beyond
 4.2 Properties of Graphene FETs
 4.3 MoS2 FETs: an Important Step Beyond GFETs
5 Impact of Charged Traps and Random Dopants on the Performance of Si MOSFETs
 5.1 Previous Descriptions and their Disadvantages
 5.2 Experimental Technique
 5.3 TCAD Simulations
 5.4 Compact Model
 5.5 Extraction of the Lateral Trap Position
 5.6 Chapter Conclusions
6 Reliability of Graphene FETs
 6.1 Introduction
 6.2 Investigated Devices: Fabrication and Basic Characteristics
 6.3 Experimental Technique
 6.4 Modeling of Carrier Distribution in GFET Channel
 6.5 Bias-Temperature Instabilities on the High-k Top Gate
 6.6 Bias-Temperature Instabilities on the SiO2 Back Gate
 6.7 Hot-Carrier Degradation
 6.8 Chapter Conclusions
7 Reliability of MoS2 FETs
 7.1 Introduction
 7.2 Investigated Devices: Fabrication and Basic Characteristics
 7.3 Experimental Technique
 7.4 Hysteresis Stability
 7.5 Analysis of Bias-Temperature Instabilities
 7.6 Modeling of BTI Characteristics Using Minimos-NT
 7.7 Chapter Conclusions
8 Conclusions and Outlook
Bibliography
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