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List of Abbreviations and Acronyms

AAPSM ... Alternating Aperture Phase Shift Masks
ASCII ... American Standard Code for Information Interchange
NMOS ... n-type MOS
PMOS ... p-type MOS
BiCMOS ... Bipolar & Complementary MOS
BSIM ... Berkeley Short-Channel IGFET Model
CD ... Critical Dimension
CIF ... Caltech Intermediate Format
CMOS ... Complementary MOS
CMP ... Chemical Mechanical Polishing
COG ... Chrome on Glass
DFT ... Design for Test
DOE ... Design of Experiments
dpm ... Defective Parts Per Million
DRAM ... Dynamical RAM
DUT ... Device Under Test
EAPSM ... Embedded Attenuated Phase Shift Masks
ECAD ... Electronic Computer-Aided Design
EDA ... Electronic Design Automation
EEPROM ... Electrically Erasable Programmable Read-Only Memory
FET ... Field-Effect Transistor
GDSII ... Geometric Data Stream II
HTM ... Half Tone Masks
HTML ... Hypertext Markup Language

IC ... Integrated Circuit
I/O ... Input/Output
ITRS ... International Technology Roadmap for Semiconductors
IV ... Current(I)-Voltage
LDD ... Lightly Doped Drain
LOCOS ... Local Oxidation of Silicon
LSL ... Lower Specification Limit
MES ... Manufacturing Execution System
MOS ... Metal-Oxide-Semiconductor
MPU ... Microprocessor Unit
MPW ... Multi Product Wafer
MOSFET ... MOS Field-Effect Transistor
NTRS ... National Technology Roadmap for Semiconductors
NVM ... Non-Volatile Memory
OPC ... Optical Proximity Correction
OTP ... One Time Programmable Device
PCM ... Process Control Monitor
PCI ... Process Capability Index
PERL ... Practical Extraction and Reporting Language
POR ... Process of Record
ppb ... Parts Per Billion
ppm ... Parts Per Million
RAM ... Random-Access Memory
RIE ... Reactive Ion Etching
RTA ... Rapid Thermal Annealing
SDT ... Single Die Tooling
SIMS ... Secondary Ion Mass Spectroscopy
SLM ... Scribe Line Monitor
SMU ... Source Measure Unit
SOC ... System On a Chip
SPICE ... Simulation Program with Integrated Circuit Emphasis
SPR ... Simple Process Representation
SRAM ... Static Random-Access Memory
TCAD ... Technology Computer-Aided Design
TEM ... Transmission Electron Microscopy
USL ... Upper Specification Limit
UV ... Ultraviolet
VBIC ... Vertical Bipolar Intercompany Model
VHDL ... Very High Speed Integrated Circuit Hardware Description Language
WIP ... Work in Process


next up previous contents
Next: List of Symbols Up: Dissertation Rainer Minixhofer Previous: Contents

R. Minixhofer: Integrating Technology Simulation into the Semiconductor Manufacturing Environment