1 Introduction

Semiconductor manufacturing relies to a large extend on computer simulation of fabrication processes and devices to reduce costs associated with experimental runs and to keep development times short.

 
• 1.1 Semiconductor Technology
  • 1.1.1 ECAD: Electronic Computer Aided Design
  • 1.1.2 CIM: Computer Integrated Manufacturing
  • 1.1.3 TCAD: Technology Computer Aided Design
• 1.2 VISTA/SFC TCAD Environment
  • 1.2.1 The VISTA Project
  • 1.2.2 Outline