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Next: 2.1.4 Inverse Modeling Up: 2.1 TCAD Optimization Tasks Previous: 2.1.2 Tool Calibration

2.1.3 Technology Development

The evaluation of new technologies for future device generations is essential following the semiconductor road-map [45]. For this stage of technological development only few data are available, if they exist at all. The known process characteristics can be extrapolated to a new technology. Also new approaches using, for instance, asymmetric doping distribution in the channel region may have large impact on future device generations [54].




R. Plasun