2.2 Two-Dimensional Profiles in Multilayer Structures

  Modeling of multilayer structures is of major interest. Nitride and silicon dioxide are often used as padding layers to mask the silicon surface or to randomize the ion beam to avoid channeling of the ions. Up to now, several numerical methods have been proposed [Wie89] [Lor90].

• 2.2.1 Numerical Range Scaling
• 2.2.2 Convolution Method