To minimize the risk of miscalibration, it is of utmost importance to include as many measurements in the calibration procedure as available. This increases the probability that the overall accuracy really improves due to calibration and a physically sound set of parameters can be found. However, time restrictions of TCAD engineers will inhibit rigorous calibrations unless the calibration procedure is automated as far as possible. Moreover, these calibrations can require significant amounts of simulation time which raises demand for an efficient processing of the evaluations of the simulation model.
SIESTA offers remedy for both of these obstacles. A Levenberg-Marquardt optimization experiment (see Section 4.2.2 on page ) can be utilized to perform an automatic calibration, and the models presented in offer an efficient way to include multiple sets of measurements with a minimal maintenance effort. Based on these features a ground-breaking inverse modeling system can be built up which leads to better TCAD models and, therefore, adds value to any TCAD system.