To minimize the risk of miscalibration, it is of utmost importance to include as many measurements in the calibration procedure as available. This increases the probability that the overall accuracy really improves due to calibration and a physically sound set of parameters can be found. However, time restrictions of TCAD engineers will inhibit rigorous calibrations unless the calibration procedure is automated as far as possible. Moreover, these calibrations can require significant amounts of simulation time which raises demand for an efficient processing of the evaluations of the simulation model.

*SIESTA* offers remedy for both of these obstacles. A
Levenberg-Marquardt optimization experiment (see Section 4.2.2 on
page ) can be utilized to perform an automatic
calibration, and the **models** presented in
offer an efficient way to include
multiple sets of measurements with a minimal maintenance effort. Based
on these features a ground-breaking inverse modeling system can be
built up which leads to better TCAD models and, therefore, adds
value to any TCAD system.

1999-05-27