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Next: 2.4.1 Optimization Target Up: 2.4 Process Optimization Previous: Manufacturability Reliability

The feasibility of a fabrication process depends on the stability of the resulting integrated circuits. Defects of devices are mainly related to a drift of the threshold voltage of CMOS devices caused by hot carriers [8,14,33,34,97], electrostatic discharge (ESD) [93], or electromigration (EMG) [11].

Rudi Strasser