{"id":524,"date":"2023-03-16T06:38:00","date_gmt":"2023-03-16T06:38:00","guid":{"rendered":"https:\/\/www.iue.tuwien.ac.at\/promod\/?post_type=news&#038;p=524"},"modified":"2024-09-10T06:40:57","modified_gmt":"2024-09-10T06:40:57","slug":"publication-in-micromachines","status":"publish","type":"news","link":"https:\/\/www.iue.tuwien.ac.at\/promod\/news\/publication-in-micromachines\/","title":{"rendered":"Publication in Micromachines"},"content":{"rendered":"\n<p>Our submission to Micromachines<\/p>\n\n\n\n<p>Bobinac, Josip, et al. &#8220;Effect of mask geometry variation on plasma etching profiles.&#8221; <em>Micromachines<\/em> 14.3 (2023): 665.<\/p>\n\n\n\n<p>has been has been accepted for publication! In the paper, we calibrate a physical model for SF6\/O2 etching and use this to examine the impact of mask geometry variation on the final etched profile. Congratulations to all involved!<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Our submission to Micromachines Bobinac, Josip, et al. &#8220;Effect of mask geometry variation on plasma etching profiles.&#8221; Micromachines 14.3 (2023): 665. has been has been accepted for publication! In the paper, we calibrate a physical model for SF6\/O2 etching and use this to examine the impact of mask geometry variation on the final etched profile&#8230;.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","template":"","tags":[],"news-category":[],"class_list":["post-524","news","type-news","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/524","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news"}],"about":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/types\/news"}],"author":[{"embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/comments?post=524"}],"version-history":[{"count":1,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/524\/revisions"}],"predecessor-version":[{"id":525,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/524\/revisions\/525"}],"wp:attachment":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/media?parent=524"}],"wp:term":[{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/tags?post=524"},{"taxonomy":"news-category","embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news-category?post=524"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}