{"id":526,"date":"2023-11-08T06:41:00","date_gmt":"2023-11-08T06:41:00","guid":{"rendered":"https:\/\/www.iue.tuwien.ac.at\/promod\/?post_type=news&#038;p=526"},"modified":"2024-09-10T06:43:19","modified_gmt":"2024-09-10T06:43:19","slug":"ald-paper-accepted-for-publication-in-sse","status":"publish","type":"news","link":"https:\/\/www.iue.tuwien.ac.at\/promod\/news\/ald-paper-accepted-for-publication-in-sse\/","title":{"rendered":"ALD paper accepted for publication in SSE"},"content":{"rendered":"\n<p>Our invited submission to the Solid-State Electronics journal<\/p>\n\n\n\n<p>Reiter, Tobias, et al. &#8220;Modeling the impact of incomplete conformality during atomic layer processing.&#8221; <em>Solid-State Electronics<\/em> 211 (2024): 108816.<\/p>\n\n\n\n<p>has been accepted for publication! This work explores means to model atomic layer processing in high aspect ratio (HAR) structure,s when ideal conformality cannot be guaranteed.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Our invited submission to the Solid-State Electronics journal Reiter, Tobias, et al. &#8220;Modeling the impact of incomplete conformality during atomic layer processing.&#8221; Solid-State Electronics 211 (2024): 108816. has been accepted for publication! This work explores means to model atomic layer processing in high aspect ratio (HAR) structure,s when ideal conformality cannot be guaranteed.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","template":"","tags":[],"news-category":[],"class_list":["post-526","news","type-news","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/526","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news"}],"about":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/types\/news"}],"author":[{"embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/comments?post=526"}],"version-history":[{"count":1,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/526\/revisions"}],"predecessor-version":[{"id":527,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/526\/revisions\/527"}],"wp:attachment":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/media?parent=526"}],"wp:term":[{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/tags?post=526"},{"taxonomy":"news-category","embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news-category?post=526"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}