{"id":529,"date":"2024-07-01T06:45:00","date_gmt":"2024-07-01T06:45:00","guid":{"rendered":"https:\/\/www.iue.tuwien.ac.at\/promod\/?post_type=news&p=529"},"modified":"2024-09-10T06:49:56","modified_gmt":"2024-09-10T06:49:56","slug":"cdl%e2%82%84promod-once-again-at-sispad","status":"publish","type":"news","link":"https:\/\/www.iue.tuwien.ac.at\/promod\/news\/cdl%e2%82%84promod-once-again-at-sispad\/","title":{"rendered":"CDL\u2084ProMod once again at SISPAD"},"content":{"rendered":"\n

The 2024 SISPAD conference will have 5 oral contributions from the CDL\u2084ProMod:<\/p>\n\n\n\n

    \n
  1. Reiter, A. Toifl, S. Kong, A. H\u00f6ssinger, and L. Filipovic, \u201cImpact of Ion Energy and Yield in Oblique Ion Beam Etching Process for Blazed Gratings,\u201d in 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2024.<\/li>\n\n\n\n
  2. S. Leroch, R. Stella, A. H\u00f6ssinger, and L. Filipovic, \u201cMD Simulation of Epitaxial Recrystallization and Defect Structure of Al-Implanted 4H-SiC,\u201d in 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2024.<\/li>\n\n\n\n
  3. B. Bamer, S. Leroch, A. H\u00f6ssinger, and L. Filipovic, \u201cCluster-Based Semi-Empirical Model for Dopant Activation in Silicon Carbide,\u201d in 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2024.<\/li>\n\n\n\n
  4. L. Filipovic, T. Reiter, J. Piso, and R. Kostal, \u201cEquipment-Informed Machine Learning-Assisted Feature-Scale Plasma Etching Model,\u201d in 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2024.<\/li>\n\n\n\n
  5. Z. Hu, L. Filipovic, J. Li, L. Wang, Z. Wu, et al., \u201cModeling Non-Uniformity During Two-Step Dry Etching of Si\/SiGe Stacks for Gate-All-Around FETs,\u201d in 2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2024.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

    The 2024 SISPAD conference will have 5 oral contributions from the CDL\u2084ProMod:<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","template":"","tags":[],"news-category":[],"class_list":["post-529","news","type-news","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/529","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news"}],"about":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/types\/news"}],"author":[{"embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/comments?post=529"}],"version-history":[{"count":1,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/529\/revisions"}],"predecessor-version":[{"id":530,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news\/529\/revisions\/530"}],"wp:attachment":[{"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/media?parent=529"}],"wp:term":[{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/tags?post=529"},{"taxonomy":"news-category","embeddable":true,"href":"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-json\/wp\/v2\/news-category?post=529"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}