![\"Map](\"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-content\/uploads\/2026\/10\/multiscale-modeling-scales.png\")
Research<\/h2>\n\n\n\n\n\n- Atomistic surface interactions<\/a> from DFT and molecular dynamics<\/li>\n\n\n\n
- Implantation and annealing<\/a> of dopants in silicon carbide<\/li>\n\n\n\n
- Feature-scale simulation<\/a> of etching and deposition<\/li>\n\n\n\n
- Process emulation<\/a> of complete device structures<\/li>\n\n\n\n
- Surrogate models and calibration<\/a> with machine learning<\/li>\n\n\n\n
- Open-source software<\/a> in the ViennaTools suite<\/li>\n<\/ul>\n<\/div><\/div>\n\n\n\n
\n
- \n
- Atomistic surface interactions<\/a> from DFT and molecular dynamics<\/li>\n\n\n\n
- Implantation and annealing<\/a> of dopants in silicon carbide<\/li>\n\n\n\n
- Feature-scale simulation<\/a> of etching and deposition<\/li>\n\n\n\n
- Process emulation<\/a> of complete device structures<\/li>\n\n\n\n
- Surrogate models and calibration<\/a> with machine learning<\/li>\n\n\n\n
- Open-source software<\/a> in the ViennaTools suite<\/li>\n<\/ul>\n<\/div><\/div>\n\n\n\n
- Implantation and annealing<\/a> of dopants in silicon carbide<\/li>\n\n\n\n
![\"TU](\"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-content\/uploads\/2023\/02\/TU_Logo-1.png\"){kind=logo}
<\/a><\/figure>\n<\/div><\/div>\n\n\n\n![\"Institute](\"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-content\/uploads\/2023\/02\/IuE-1.jpeg\")
<\/a><\/figure>\n<\/div><\/div>\n\n\n\n![\"Silvaco](\"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-content\/uploads\/2023\/02\/silvaco_logo-2000x744-1-3.jpg\"){kind=logo}
<\/a><\/figure>\n<\/div><\/div>\n\n\n\n![\"Christian](\"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-content\/uploads\/2023\/02\/cdg_logo_rgb-2.jpg\"){kind=logo}
<\/a><\/figure>\n<\/div><\/div>\n\n\n\n![\"Logo](\"https:\/\/www.iue.tuwien.ac.at\/promod\/wp-content\/uploads\/2026\/10\/bmwet-logo-en.jpg\"){kind=logo}
<\/a><\/figure>\n<\/div><\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"