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Publications Luiz Felipe Aguinsky

7 records


Publications in Scientific Journals


1. A. Toifl, F. Rodrigues, L.F. Aguinsky, A. Hössinger, J. Weinbub:
"Continuum Level-Set Model for Anisotropic Wet Etching of Patterned Sapphire Substrates";
Semiconductor Science and Technology, 36, (2021), 045016-1 - 045016-12 doi:10.1088/1361-6641/abe49b. BibTeX


Talks and Poster Presentations (with Proceedings-Entry)


6. L.F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"An Extended Knudsen Diffusion Model for Aspect Ratio Dependent Atomic Layer Etching";
Talk: International Workshop on Atomic Layer Etching (ALE), Bellevue, WA, USA; 2019-07-21 - 2019-07-24; in "Abstracts of the International Conference on Atomic Layer Deposition (ALD) Featuring the International Workshop on Atomic Layer Etching (ALE)", (2019), 109. BibTeX

5. L.F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"Three-Dimensional TCAD for Atomic Layer Processing";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 5. BibTeX

4. P. Manstetten, L.F. Aguinsky, S. Selberherr, J. Weinbub:
"High-Performance Ray Tracing for Nonimaging Applications";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 20. BibTeX

3. P. Manstetten, G. Diamantopoulos, L. Gnam, L.F. Aguinsky, M. Quell, A. Toifl, A. Scharinger, A. Hössinger, M. Ballicchia, M. Nedjalkov, J. Weinbub:
"High Performance TCAD: From Simulating Fabrication Processes to Wigner Quantum Transport";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 13. BibTeX

2. L.F. Aguinsky, P. Manstetten, A. Hössinger, S. Selberherr, J. Weinbub:
"A Mathematical Extension to Knudsen Diffusion Including Direct Flux and Accurate Geometric Description";
Poster: International Workshop on Computational Nanotechnology (IWCN), Chicago, IL, USA; 2019-05-20 - 2019-05-24; in "Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN)", (2019), ISBN: 978-3-9504738-0-3, 109 - 110. BibTeX

1. G. Diamantopoulos, P. Manstetten, L. Gnam, V. Simonka, L.F. Aguinsky, M. Quell, A. Toifl, A. Hössinger, J. Weinbub:
"Recent Advances in High Performance Process TCAD";
Talk: SIAM Conference on Computational Science and Engineering, Spokane, WA, USA; 2019-02-25 - 2019-03-01; in "CSE19 Abstracts", (2019), 335. BibTeX

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Institute for Microelectronics
Head: Univ. Prof. Dipl.-Ing. Dr. techn. Tibor Grasser
Deputy Head: O. Univ. Prof. Dipl.-Ing. Dr. techn. Dr.h.c. Siegfried Selberherr
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