Publications Otmar Ertl

13 records

Publications in Scientific Journals

2.   Ertl, O., Selberherr, S. (2010).
Three-Dimensional Level Set Based Bosch Process Simulations Using Ray Tracing for Flux Calculation.
Microelectronic Engineering, 87(1), 20–29. https://doi.org/10.1016/j.mee.2009.05.011 (reposiTUm)

1.   Ertl, O., Selberherr, S. (2009).
A Fast Level Set Framework for Large Three-Dimensional Topography Simulations.
Computer Physics Communications, 180(8), 1242–1250. https://doi.org/10.1016/j.cpc.2009.02.002 (reposiTUm)

Talks and Poster Presentations (with Proceedings-Entry)

7.   Filipovic, L., Ertl, O., Selberherr, S. (2011).
Parallelization Strategy for Hierarchical Run Length Encoded Data Structures.
In Proceedings of the IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011) (pp. 131–138), Innsbruck. (reposiTUm)

6.   Ertl, O., Filipovic, L., Selberherr, S. (2010).
Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method.
In 2010 International Conference on Simulation of Semiconductor Processes and Devices, Bologna, Italy. https://doi.org/10.1109/sispad.2010.5604573 (reposiTUm)

5.   Ertl, O., Selberherr, S. (2009).
A Fast Void Detection Algorithm for Three-Dimensional Deposition Simulation.
In 2009 International Conference on Simulation of Semiconductor Processes and Devices, San Diego, CA, United States. https://doi.org/10.1109/sispad.2009.5290221 (reposiTUm)

4.   Ertl, O., Selberherr, S. (2009).
Three-Dimensional Plasma Etching Simulation Using Advanced Ray Tracing and Level Set Techniques.
In ECS Transactions (pp. 61–68), Ouro Preto. (reposiTUm)

3.   Ertl, O., Selberherr, S. (2008).
Three-Dimensional Topography Simulation Using Advanced Level Set and Ray Tracing Methods.
In 2008 International Conference on Simulation of Semiconductor Processes and Devices, Kanagawa, Japan. https://doi.org/10.1109/sispad.2008.4648303 (reposiTUm)

2.   Ertl, O., Heitzinger, C., Selberherr, S. (2007).
Efficient Coupling of Monte Carlo and Level Set Methods for Topography Simulation.
In Simulation of Semiconductor Processes and Devices 2007 (pp. 417–420), Vienna, Austria. https://doi.org/10.1007/978-3-211-72861-1_101 (reposiTUm)

1.   Cervenka, J., Ceric, H., Ertl, O., Selberherr, S. (2007).
Three-Dimensional Sacrificial Etching.
In Simulation of Semiconductor Processes and Devices 2007 (pp. 433–436), Vienna, Austria. https://doi.org/10.1007/978-3-211-72861-1_105 (reposiTUm)

Doctor's Theses (authored and supervised)

Diploma and Master Theses (authored and supervised)

1.   Ertl, O. (2005).
Read Back Signals in Magnetic Recording
Technische Universität Wien. (reposiTUm)

Scientific Reports

2.   Baumgartner, O., Ertl, O., Orio, R., Wagner, P.-J., Windbacher, T., Selberherr, S. (2009).
VISTA Status Report December 2009.
(reposiTUm)

1.   Baumgartner, O., Ertl, O., Gös, W., Stimpfl, F., Windbacher, T., Selberherr, S. (2008).
VISTA Status Report December 2008.
(reposiTUm)