Publications Otmar Ertl
13 recordsPublications in Scientific Journals
2. | Ertl, O., Selberherr, S. (2010). Three-Dimensional Level Set Based Bosch Process Simulations Using Ray Tracing for Flux Calculation. Microelectronic Engineering, 87(1), 20–29. https://doi.org/10.1016/j.mee.2009.05.011 (reposiTUm) | |
1. | Ertl, O., Selberherr, S. (2009). A Fast Level Set Framework for Large Three-Dimensional Topography Simulations. Computer Physics Communications, 180(8), 1242–1250. https://doi.org/10.1016/j.cpc.2009.02.002 (reposiTUm) | |
Talks and Poster Presentations (with Proceedings-Entry)
7. | Filipovic, L., Ertl, O., Selberherr, S. (2011). Parallelization Strategy for Hierarchical Run Length Encoded Data Structures. In Proceedings of the IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011) (pp. 131–138), Innsbruck. (reposiTUm) | |
6. | Ertl, O., Filipovic, L., Selberherr, S. (2010). Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method. In 2010 International Conference on Simulation of Semiconductor Processes and Devices, Bologna, Italy. https://doi.org/10.1109/sispad.2010.5604573 (reposiTUm) | |
5. | Ertl, O., Selberherr, S. (2009). A Fast Void Detection Algorithm for Three-Dimensional Deposition Simulation. In 2009 International Conference on Simulation of Semiconductor Processes and Devices, San Diego, CA, United States. https://doi.org/10.1109/sispad.2009.5290221 (reposiTUm) | |
4. | Ertl, O., Selberherr, S. (2009). Three-Dimensional Plasma Etching Simulation Using Advanced Ray Tracing and Level Set Techniques. In ECS Transactions (pp. 61–68), Ouro Preto. (reposiTUm) | |
3. | Ertl, O., Selberherr, S. (2008). Three-Dimensional Topography Simulation Using Advanced Level Set and Ray Tracing Methods. In 2008 International Conference on Simulation of Semiconductor Processes and Devices, Kanagawa, Japan. https://doi.org/10.1109/sispad.2008.4648303 (reposiTUm) | |
2. | Ertl, O., Heitzinger, C., Selberherr, S. (2007). Efficient Coupling of Monte Carlo and Level Set Methods for Topography Simulation. In Simulation of Semiconductor Processes and Devices 2007 (pp. 417–420), Vienna, Austria. https://doi.org/10.1007/978-3-211-72861-1_101 (reposiTUm) | |
1. | Cervenka, J., Ceric, H., Ertl, O., Selberherr, S. (2007). Three-Dimensional Sacrificial Etching. In Simulation of Semiconductor Processes and Devices 2007 (pp. 433–436), Vienna, Austria. https://doi.org/10.1007/978-3-211-72861-1_105 (reposiTUm) | |
Doctor's Theses (authored and supervised)
1. | Ertl, O. (2010). Numerical Methods for Topography Simulation Technische Universität Wien. https://doi.org/10.34726/hss.2010.001 (reposiTUm) | |
Diploma and Master Theses (authored and supervised)
1. | Ertl, O. (2005). Read Back Signals in Magnetic Recording Technische Universität Wien. (reposiTUm) | |
Scientific Reports
2. | Baumgartner, O., Ertl, O., Orio, R., Wagner, P.-J., Windbacher, T., Selberherr, S. (2009). VISTA Status Report December 2009. (reposiTUm) | |
1. | Baumgartner, O., Ertl, O., Gös, W., Stimpfl, F., Windbacher, T., Selberherr, S. (2008). VISTA Status Report December 2008. (reposiTUm) | |