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Publications Lado Filipovic

107 records


Books and Editorships

4. L. Filipovic, T. Grasser:
"Miniaturized Transistors, Volume II";
MDPI, Basel, (2022), ISBN: 978-3-0365-4169-3, 352 page(s) doi:10.3390/books978-3-0365-4170-9. BibTeX
3. L. Filipovic, T. Grasser:
"Special Issue on Miniaturized Transistors, Volume II";
Micromachines, 13, (2022), 1 - 4 doi:10.3390/mi13040603. BibTeX
2. L. Filipovic, T. Grasser:
"Miniaturized Transistors";
MDPI, (2019), ISBN: 978-3-03921-010-7, 202 page(s) doi:10.3390/books978-3-03921-011-4. BibTeX
1. L. Filipovic, T. Grasser:
"Editorial for the Special Issue on Miniaturized Transistors";
Micromachines, 10, (2019), 1 - 3 doi:10.3390/mi10050300. BibTeX

Publications in Scientific Journals

25. T. Knobloch, U. Burkay, Yu. Illarionov, Z. Wang, M. Otto, L. Filipovic, M. Waltl, D. Neumaier, M. Lemme, T. Grasser:
"Improving Stability in Two-Dimensional Transistors with Amorphous Gate Oxides by Fermi-Level Tuning";
Nature Electronics, 5, (2022), 356 - 366 doi:10.1038/s41928-022-00768-0. BibTeX
24. T. Reiter, X. Klemenschits, L. Filipovic:
"Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash Memory";
Solid-State Electronics, 192, (invited) (2022), 108261-1 - 108261-9 doi:10.1016/j.sse.2022.108261. BibTeX
23. M. Waltl, T. Knobloch, K. Tselios, L. Filipovic, B. Stampfer, Y. Hernandez, D. Waldhör, Y. Illarionov, B. Kaczer, T. Grasser:
"Perspective of 2D Integrated Electronic Circuits: Scientific Pipe Dream or Disruptive Technology?";
Advanced Materials, n/a, (invited) (2022), 2201082-1 - 2201082-23 doi:10.1002/adma.202201082. BibTeX
22. S. Fatemeh, M. Moradinasab, U. Schwalke, L. Filipovic:
"Superior Sensitivity and Optical Response of Blue Phosphorene and Its Doped Systems for Gas Sensing Applications";
ACS Omega, 6, (2021), 18770 - 18781 doi:10.1021/acsomega.1c01898. BibTeX
21. L. Filipovic:
"Theoretical Examination of Thermo-Migration in Novel Platinum Microheaters";
Microelectronics Reliability, 123, (2021), 114219-1 - 114219-14 doi:10.1016/j.microrel.2021.114219. BibTeX
20. L. Filipovic, S. Selberherr:
"Microstructure and Granularity Effects in Electromigration";
IEEE Journal of the Electron Devices Society, 9, (invited) (2021), 476 - 483 doi:10.1109/JEDS.2020.3044112. BibTeX
19. X. Klemenschits, S. Selberherr, L. Filipovic:
"Geometric Advection and Its Application in the Emulation of High Aspect Ratio Structures";
Computer Methods in Applied Mechanics and Engineering, 386, (2021), 114196-1 - 114196-22 doi:10.1016/j.cma.2021.114196. BibTeX
18. L. Filipovic:
"A Method for Simulating the Influence of Grain Boundaries and Material Interfaces on Electromigration";
Microelectronics Reliability, 97, (2019), 38 - 52 doi:10.1016/j.microrel.2019.04.005. BibTeX
17. L. Filipovic, S. Selberherr:
"Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors";
Materials, 12, (invited) (2019), 2410-1 - 2410-37 doi:10.3390/ma12152410. BibTeX
16. A. Lahlalia, O. Le Neel, R. Shankar, S. Selberherr, L. Filipovic:
"Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices";
Sensors, 19, (2019), 374-1 - 374-14 doi:10.3390/s19020374. BibTeX
15. L. Filipovic, A. Lahlalia:
"Review-System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology";
Journal of the Electrochemical Society, 165, (2018), 862 - 879 doi:10.1149/2.0731816jes. BibTeX
14. X. Klemenschits, S. Selberherr, L. Filipovic:
"Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review";
Micromachines, 9, (invited) (2018), 631-1 - 631-31 doi:10.3390/mi9120631. BibTeX
13. A. Lahlalia, L. Filipovic, S. Selberherr:
"Modeling and Simulation of Novel Semiconducting Metal Oxide Gas Sensors for Wearable Devices";
IEEE Sensors Journal, 18, (2018), 1960 - 1970 doi:10.1109/JSEN.2018.2790001. BibTeX
12. A. Lahlalia, O. Le Neel, R. Shankar, S.-Y. Kam, L. Filipovic:
"Electro-Thermal Simulation & Characterization of a Microheater for SMO Gas Sensors";
Journal Of Microelectromechanical Systems, 27, (2018), 529 - 537 doi:10.1109/JMEMS.2018.2822942. BibTeX
11. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Framework to Model Neutral Particle Flux in Convex High Aspect Ratio Structures using One-Dimensional Radiosity";
Solid-State Electronics, 128, (invited) (2017), 141 - 147 doi:10.1016/j.sse.2016.10.029. BibTeX
10. L. Filipovic, S. Selberherr:
"Stress Considerations for System-on-Chip Gas Sensor Integration in CMOS Technology";
IEEE Transactions on Device and Materials Reliability, 16, (2016), 483 - 495 doi:10.1109/TDMR.2016.2625461. BibTeX
9. L. Filipovic, S. Selberherr:
"Stress in Three-Dimensionally Integrated Sensor Systems";
Microelectronics Reliability, 61, (2016), 3 - 10 doi:10.1016/j.microrel.2015.09.013. BibTeX
8. E. Baer, P. Evanschitzky, J. Lorenz, F. Roger, R. Minixhofer, L. Filipovic, R. Orio, S. Selberherr:
"Coupled Simulation to Determine the Impact of Across Wafer Variations in Oxide PECVD on Electrical and Reliability Parameters of Through-Silicon Vias";
Microelectronic Engineering, 137, (2015), 141 - 145 doi:10.1016/j.mee.2014.11.014. BibTeX
7. L. Filipovic, S. Selberherr:
"Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors";
Sensors, 15, (2015), 7206 - 7227 doi:10.3390/s150407206. BibTeX
6. L. Filipovic, A. P. Singulani, F. Roger, S. Carniello, S. Selberherr:
"Intrinsic Stress Analysis of Tungsten-Lined Open TSVs";
Microelectronics Reliability, 55, (2015), 1843 - 1848 doi:10.1016/j.microrel.2015.06.014. BibTeX
5. L. Filipovic, S. Selberherr:
"The Effects of Etching and Deposition on the Performance and Stress Evolution of Open Through Silicon Vias";
Microelectronics Reliability, 54, (2014), 1953 - 1958 doi:10.1016/j.microrel.2014.07.014. BibTeX
4. L. Filipovic, S. Selberherr, G. Mutinati, E. Brunet, S. Seinhauer, A. Köck, J. Teva, J. Kraft, J. Siegert, F. Schrank:
"Methods of Simulating Thin Film Deposition Using Spray Pyrolysis Techniques";
Microelectronic Engineering, 117, (2014), 57 - 66 doi:10.1016/j.mee.2013.12.025. BibTeX
3. L. Filipovic, S. Selberherr, G. Mutinati, E. Brunet, S. Steinhauer, A. Köck, J. Teva, J. Kraft, J. Siegert, F. Schrank, C. Gspan, W. Grogger:
"Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications";
IEEE Transactions on Semiconductor Manufacturing, 27, (2014), 269 - 277 doi:10.1109/TSM.2014.2298883. BibTeX
2. L. Filipovic, S. Selberherr:
"A Method for Simulating Atomic Force Microscope Nanolithography in the Level Set Framework";
Microelectronic Engineering, 107, (2013), 23 - 32 doi:10.1016/j.mee.2013.02.083. BibTeX
1. L. Filipovic, S. Selberherr, G. Mutinati, E. Brunet, S. Seinhauer, A. Köck, J. Teva, J. Kraft, J. Siegert, F. Schrank, C. Gspan, W. Grogger:
"A Method for Simulating Spray Pyrolysis Deposition in the Level Set Framework";
Engineering Letters, 21, (invited) (2013), 224 - 240. BibTeX

Contributions to Books

12. L. Filipovic, S. Selberherr:
"Electro-Thermo-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors";
in "Prime Archives in Material Science", 3, M. Khan (ed); Vide Leaf, (invited) 2021, ISBN: 978-81-953047-9-0, 1 - 38. BibTeX
11. T. Reiter, X. Klemenschits, L. Filipovic:
"Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory";
in "Proceedings of the 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", B. Cretu (ed); IEEE, 2021, ISBN: 978-1-6654-3745-5, 1 - 4 doi:10.1109/EuroSOI-ULIS53016.2021.9560693. BibTeX
10. R. Coppeta, A. Lahlalia, D. Kozic, R. Hammer, J. Riedler, G. Toschkoff, A.P. Singulani, Z. Ali, M. Sagmeister, S. Carniello, S. Selberherr, L. Filipovic:
"Electro-Thermal-Mechanical Modeling of Gas Sensor Hotplates";
in "Sensor Systems Simulations", W. van Driel, O. Pyper, C. Schumann (ed); Springer International Publishing, 2020, ISBN: 978-3-030-16577-2, 17 - 72 doi:10.1007/978-3-030-16577-2_2. BibTeX
9. X. Klemenschits, S. Selberherr, L. Filipovic:
"Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review";
in "Miniaturized Transistors", L. Filipovic, T. Grasser (ed); MDPI, (invited) 2019, ISBN: 978-3-03921-010-7, 105 - 135 doi:10.3390/books978-3-03921-011-4. BibTeX
8. L. Filipovic, A. Lahlalia:
"System-on-Chip Sensor Integration in Advanced CMOS Technology";
in "Advanced CMOS-Compatible Semiconductor Devices 18, Vol. 85, No. 8", issued by The Electrochemical Society; J. A. Martino, J.-P. Raskin, S. Selberherr, H. Ishii, F. Gamiz, B.-Y. Nguyen, A. Yoshino (ed); ECS Transactions, (invited) 2018, ISBN: 978-1-62332-488-9, 151 - 162 doi:10.1149/08508.0151ecst. BibTeX
7. X. Klemenschits, S. Selberherr, L. Filipovic:
"Unified Feature Scale Model for Etching in SF6 and Cl Plasma Chemistries";
in "Proceedings of the 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", F. Gamiz, V. Sverdlov, C. Sampedro, L. Donetti (ed); IEEE, 2018, ISBN: 978-1-5386-4812-4, 177 - 180 doi:10.1109/ULIS.2018.8354763. BibTeX
6. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Using One-Dimensional Radiosity to Model Neutral Particle Flux in High Aspect Ratio Holes";
in "Proceedings of the 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", V. Sverdlov, S. Selberherr (ed); IEEE, 2016, ISBN: 978-1-4673-8608-1, 120 - 123 doi:10.1109/ULIS.2016.7440067. BibTeX
5. L. Filipovic, S. Selberherr:
"Stress Considerations in Thin Films for CMOS-Integrated Gas Sensors";
in "Advanced CMOS-Compatible Semiconductor Devices 17, Vol.66, No.5", issued by The Electrochemical Society; Y. Omura, J. A. Martino, J.-P. Raskin, S. Selberherr, H. Ishii, F. Gamiz, B.-Y. Nguyen (ed); ECS Transactions, 2015, ISBN: 978-1-62332-238-0, 243 - 250 doi:10.1149/06605.0243ecst. BibTeX
4. L. Filipovic, S. Selberherr, G. Mutinati, E. Brunet, S. Steinhauer, A. Köck, J. Teva, J. Kraft, J. Siegert, F. Schrank, C. Gspan, W. Grogger:
"Modeling and Analysis of Spray Pyrolysis Deposited SnO2 Films for Gas Sensors";
in "Transactions on Engineering Technologies", G.-C. Yang, S.-L. Ao, L. Gelman (ed); Springer, 2014, ISBN: 978-94-017-8831-1, 295 - 310 doi:10.1007/978-94-017-8832-8_22. BibTeX
3. L. Filipovic, S. Selberherr:
"A Monte Carlo Simulator for Non-contact Mode Atomic Force Microscopy";
in "Large-Scale Scientific Computing, Lecture Notes in Computer Science", 7116, I. Lirkov, S. Margenov, J. Wasniewski (ed); Springer Berlin Heidelberg, 2012, ISBN: 978-3-642-29842-4, 447 - 454 doi:10.1007/978-3-642-29843-1_50. BibTeX
2. L. Filipovic, S. Selberherr:
"A Two-Dimensional Lorentzian Distribution for an Atomic Force Microscopy Simulator";
in "Monte Carlo Methods and Applications", K. K. Sabelfeld, I. Dimov (ed); De Gruyter, 2012, ISBN: 978-3-11-029347-0, 97 - 104 doi:10.1515/9783110293586.97. BibTeX
1. J. Weinbub, K. Rupp, L. Filipovic, A. Makarov, S. Selberherr:
"Towards a Free Open Source Process and Device Simulation Framework";
in "The 15th International Workshop on Computational Electronics (IWCE)", IEEE Xplore, 2012, ISBN: 978-1-4673-0705-5, 1 - 4 doi:10.1109/IWCE.2012.6242867. BibTeX

Talks and Poster Presentations (with Proceedings-Entry)

61. J. Bobinac, T. Reiter, J. Piso, X. Klemenschits, O. Baumgartner, Z. Stanojevic, G. Strof, M. Karner, L. Filipovic:
"Impact of Mask Tapering on SF6/O2 Plasma Etching";
Talk: Fourth International Conference on Microelectronic Devices and Technologies (MicDAT '2022), Corfu, Greece; 2022-09-21 - 2022-09-23; in "Microelectronic Devices and Technologies: Proceedings of the 4rd International Conference on Microelectronic Devices and Technologies (MicDAT '2022)", (2022), ISBN: 978-84-09-43856-3, 90 - 94. BibTeX
60. L. Gollner, R. Steiner, L. Filipovic:
"Study of Phonon-limited Electron Transport in Monolayer MoS2";
Talk: Fourth International Conference on Microelectronic Devices and Technologies (MicDAT '2022), Corfu, Greece; 2022-09-21 - 2022-09-23; in "Microelectronic Devices and Technologies Proceedings of the 4rd International Conference on Microelectronic Devices and Technologies (MicDAT 2022)", (2022), ISBN: 978-84-09-43856-3, 74 - 78. BibTeX
59. L.F. Aguinsky, F. Rodrigues, X. Klemenschits, L. Filipovic, A. Hössinger, J. Weinbub:
"Modeling Non-Ideal Conformality during Atomic Layer Deposition in High Aspect Ratio Structures";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022), Granada, Spain; 2022-09-06 - 2022-09-08; in "SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet", (2022), 40 - 41. BibTeX
58. L. Filipovic, O. Baumgartner, J. Piso, J. Bobinac, T. Reiter, G. Strof, G. Rzepa, Z. Stanojevic, M. Karner:
"DTCO Flow for Air Spacer Generation and its Impact on Power and Performance at N7";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022), Granada, Spain; 2022-09-06 - 2022-09-08; in "SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet", (2022), 34 - 35. BibTeX
57. L. Filipovic:
"Reliability and Stability of MEMS Microheaters for Gas Sensors";
Talk: IEEE International Integrated Reliability Workshop (IIRW), online; (invited) 2021-10-04 - 2021-10-28; in "2021 IEEE International Integrated Reliability Workshop (IIRW)", (2021), ISBN: 978-1-6654-1794-5, doi:10.1109/IIRW53245.2021.9635162. BibTeX
56. L. Filipovic, X. Klemenschits:
"Fast Model for Deposition in Trenches using Geometric Advection";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Dallas, Texas (USA); 2021-09-27 - 2021-09-29; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2021), 224 - 228 doi:10.1109/SISPAD54002.2021.9592595. BibTeX
55. X. Klemenschits, S. Selberherr, L. Filipovic:
"Combined Process Simulation and Emulation of an SRAM Cell of the 5nm Technology Node";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Dallas, Texas (USA); 2021-09-27 - 2021-09-29; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2021), 23 - 27 doi:10.1109/SISPAD54002.2021.9592605. BibTeX
54. L. Filipovic, S. Selberherr:
"Gas Sensing with Two-Dimensional Materials Beyond Graphene";
Talk: International Conference on Microelectronics (MIEL), Nis, Serbia; (invited) 2021-09-12 - 2021-09-14; in "Proceedings of the International Conference on Microelectronics (MIEL)", (2021), ISBN: 978-1-6654-4526-9, 29 - 36 doi:10.1109/MIEL52794.2021.9569088. BibTeX
53. T. Reiter, X. Klemenschits, L. Filipovic:
"Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory";
Poster: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Caen, France; 2021-09-01 - 2021-09-03; in "Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", (2021), 34 - 35. BibTeX
52. L. Filipovic:
"Modeling and Simulation of ALD in a Level Set Framework";
Talk: EFDS Workshop on Simulation for ALD, virtual; (invited) 2021-03-25 in "Proceedings of the EFDS Workshop on Simulation for ALD", (2021), 9. BibTeX
51. L. Filipovic:
"Electromigration Model for Platinum Hotplates";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kobe, Japan - virtual; 2020-09-23 - 2020-10-06; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2020), 315 - 318 doi:10.23919/SISPAD49475.2020.9241645. BibTeX
50. X. Klemenschits, S. Selberherr, L. Filipovic:
"Geometric Advection Algorithm for Process Emulation";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kobe, Japan - virtual; 2020-09-23 - 2020-10-06; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2020), 59 - 62 doi:10.23919/SISPAD49475.2020.9241678. BibTeX
49. L. Filipovic, S. Selberherr:
"Integration of Gas Sensors with CMOS Technology";
Talk: IEEE Electron Devices Technology and Manufacturing Conference (EDTM), Penang, Malaysia - virtual; (invited) 2020-03-16 - 2020-03-18; in "Proceedings of the IEEE Electron Devices Technology and Manufacturing Conference (EDTM)", (2020), ISBN: 978-1-7281-2539-8, 294 - 297 doi:10.1109/EDTM47692.2020.9117828. BibTeX
48. L. Filipovic, S. Selberherr:
"Granularity Effects in Electromigration";
Talk: IEEE Latin America Electron Devices Conference (LAEDC), San Jose, Costa Rica; (invited) 2020-02-25 - 2020-02-28; in "Proceedings of the IEEE Latin America Electron Devices Conference (LAEDC)", (2020), ISBN: 978-1-7281-1044-8, doi:10.1109/LAEDC49063.2020.9072963. BibTeX
47. L. Filipovic, S. Selberherr:
"CMOS-Compatible Gas Sensors";
Talk: International Conference on Microelectronics (MIEL), Nis, Serbia; (invited) 2019-09-16 - 2019-09-18; in "Proceedings of the International Conference on Microelectronics (MIEL)", (2019), 9 - 16 doi:10.1109/MIEL.2019.8889585. BibTeX
46. L. Filipovic:
"Modeling and Simulation of Atomic Layer Deposition";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Udine, Italy; 2019-09-04 - 2019-09-06; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2019), ISBN: 978-1-7281-0938-1, 323 - 326 doi:10.1109/SISPAD.2019.8870462. BibTeX
45. X. Klemenschits, P. Manstetten, L. Filipovic, S. Selberherr:
"Process Simulation in the Browser: Porting ViennaTS using WebAssembly";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Udine, Italy; 2019-09-04 - 2019-09-06; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2019), ISBN: 978-1-7281-0938-1, 339 - 342 doi:10.1109/SISPAD.2019.8870374. BibTeX
44. L. Filipovic, R. Orio:
"Electromigration in Nano-Interconnects";
Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; (invited) 2019-05-24 - 2019-05-25; in "Book of Abstracts of the Workshop on High Performance TCAD (WHPTCAD)", (2019), 2. BibTeX
43. X. Klemenschits, S. Selberherr, L. Filipovic:
"Fast Volume Evaluation on Sparse Level Sets";
Poster: International Workshop on Computational Nanotechnology (IWCN), Chicago, IL, USA; 2019-05-20 - 2019-05-24; in "Book of Abstracts of the International Workshop on Computational Nanotechnology (IWCN)", (2019), ISBN: 978-3-9504738-0-3, 113 - 114. BibTeX
42. S. Selberherr, L. Filipovic:
"CMOS Compatible Gas Sensors";
Talk: International Conference on Materials Science and Engineering, San Francisco, CA, USA; (invited) 2019-02-18 - 2019-02-20; in "Book of Abstracts of the International Conference on Materials Science and Engineering", (2019), 1 page(s) . BibTeX
41. L. Filipovic, R. Orio:
"Modeling the Influence of Grains and Material Interfaces on Electromigration";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Austin, Texas, USA; 2018-09-24 - 2018-09-26; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2018), ISBN: 978-1-5386-6788-0, 83 - 87 doi:10.1109/SISPAD.2018.8551746. BibTeX
40. A. Lahlalia, O. Le Neel, R. Shankar, S. Selberherr, L. Filipovic:
"Enhanced Sensing Performance of Integrated Gas Sensor Devices";
Poster: EUROSENSORS, Graz, Austria; 2018-09-09 - 2018-09-12; in "Proceedings of EUROSENSORS 2018", (2018), ISBN: 978-3-00-025217-4, 5 page(s) doi:10.3390/proceedings2131508. BibTeX
39. L. Filipovic, A. Lahlalia, S. Selberherr:
"System-on-Chip Sensor Integration in Advanced CMOS Technology";
Talk: 233rd ECS Meeting (ECS), Seattle, Washington, USA; (invited) 2018-05-13 - 2018-05-17; in "Proceedings of the 233rd ECS Meeting (ECS)", (2018), ISSN: 2151-2043, . BibTeX
38. L. Filipovic:
"CMOS-Compatible Semiconductor-Based Gas Sensors";
Talk: Emerging Technologies Communication Microsystems Optoelectronics Sensing (ETCMOS), Whistler, British Columbia, Canada; (invited) 2018-05-09 - 2018-05-11; in "Book of Abstracts of Emerging Technologies Communication Microsystems Optoelectronics Sensors", (2018), . BibTeX
37. X. Klemenschits, S. Selberherr, L. Filipovic:
"Unified Feature Scale Model for Etching in SF6 and Cl Plasma Chemistries";
Poster: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Granada, Spain; 2018-03-19 - 2018-03-21; in "Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", (2018), ISBN: 978-1-5386-4810-0, 65 - 66. BibTeX
36. L. Filipovic, R.L. de Orio, W. H. Zisser, S. Selberherr:
"Modeling Electromigration in Nanoscaled Copper Interconnects";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kamakura, Japan; 2017-09-07 - 2017-09-09; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2017), ISBN: 978-4-86348-612-6, 161 - 164 doi:10.23919/SISPAD.2017.8085289. BibTeX
35. J. Cervenka, L. Filipovic:
"Numerical Aspects of the Deterministic Solution of the Wigner Equation";
Poster: International Wigner Workshop (IW2), Low Wood Bay, Lake District, UK; 2017-06-05 in "Book of Abstracts of the International Wigner Workshop (IW2)", (2017), ISBN: 978-3-200-05129-4, 42 - 43. BibTeX
34. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Using One-Dimensional Radiosity to Model Neutral Flux in Convex High Aspect Ratio Structures";
Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Nürnberg, Deutschland; 2016-09-06 - 2016-09-08; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2016), ISBN: 978-1-5090-0817-9, 265 - 268 doi:10.1109/SISPAD.2016.7605198. BibTeX
33. L. Filipovic, S. Selberherr:
"Effects of the Deposition Process Variation on the Performance of Open TSVs";
Poster: IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV, USA; 2016-05-31 - 2016-06-03; in "Proceedings of IEEE Electronic Components and Technology Conference (ECTC)", (2016), ISBN: 978-1-5090-1204-6, 2188 - 2195 doi:10.1109/ECTC.2016.177. BibTeX
32. L. Filipovic, A. P. Singulani, F. Roger, S. Carniello, S. Selberherr:
"Impact of Across-Wafer Variation on the Electrical Performance of TSVs";
Talk: IEEE International Interconnect Technology Conference (IITC), San Jose, CA, USA; 2016-05-23 - 2016-05-26; in "Proceedings of the IEEE International Interconnect Technology Conference (IITC)", (2016), ISBN: 978-1-5090-0386-0, 130 - 132 doi:10.1109/IITC-AMC.2016.7507707. BibTeX
31. L. Filipovic, S. Selberherr:
"Modeling the Deposition and Stress Generation in Thin Films for CMOS-Integrated Gas Sensors";
Talk: World Congress of Smart Materials (WCSM), Singapore; (invited) 2016-03-04 - 2016-03-06; in "Proceedings of the BIT's 2nd Annual World Congress of Smart Materials 2016", (2016), 517. BibTeX
30. P. Manstetten, L. Filipovic, A. Hössinger, J. Weinbub, S. Selberherr:
"Modeling Neutral Particle Flux in High Aspect Ratio Holes using a One-Dimensional Radiosity Approach";
Talk: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Wien; 2016-01-25 - 2016-01-27; in "Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", (2016), ISBN: 978-3-901578-29-8, 68 - 69. BibTeX
29. L. Filipovic, S. Selberherr:
"Processing of Integrated Gas Sensor Devices";
Talk: IEEE International Technical Conference of IEEE Region 10 (TENCON), Macau, China; (invited) 2015-11-01 - 2015-11-04; in "Proceedings of the IEEE International Technical Conference of IEEE Region 10 (TENCON)", (2015), ISBN: 978-1-4799-8639-2, 6 page(s) doi:10.1109/TENCON.2015.7372781. BibTeX
28. L. Filipovic, A. P. Singulani, F. Roger, S. Carniello, S. Selberherr:
"Intrinsic Stress Analysis of Tungsten-Lined Open TSVs";
Talk: European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Toulouse, France; 2015-10-05 - 2015-10-09; in "Abstracts of the 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis", (2015), 71. BibTeX
27. F. Roger, A. P. Singulani, S. Carniello, L. Filipovic, S. Selberherr:
"Global Statistical Methodology for the Analysis of Equipment Parameter Effects on TSV Formation";
Talk: International Workshop on CMOS Variability (VARI), Salvador, Brazil; 2015-09-01 - 2015-09-04; in "Proceedings of the 6th International Workshop on CMOS Variability (VARI)", (2015), ISBN: 978-1-5090-0071-5, 39 - 44 doi:10.1109/VARI.2015.7456561. BibTeX
26. L. Filipovic, S. Selberherr:
"Stress in Three-Dimensionally Integrated Sensor Systems";
Talk: International Conference on Materials for Advanced Technologies(ICMAT), Singapore; (invited) 2015-06-28 - 2015-07-03; in "Abstracts of the 2015 International Conference on Materials for Advanced Technologies (ICMAT)", (2015), 342. BibTeX
25. L. Filipovic, S. Selberherr:
"Stress Considerations in Thin Films for CMOS-Integrated Gas Sensors";
Talk: Meeting of the Electrochemical Society (ECS), Chicago, Illinois, USA; 2015-05-24 - 2015-05-28; in "Proceedings of the 227th ECS Meeting (ECS)", (2015), 67, ISSN: 1938-6737, 2 page(s) . BibTeX
24. L. Filipovic, S. Selberherr:
"Kinetics of Droplet Motion During Spray Pyrolysis";
Talk: Energy-Materials-Nanotechnology Meeting on Droplets (EMN), Phuket, Thailand; (invited) 2015-05-08 - 2015-05-11; in "Abstracts of the Energy-Materials-Nanotechnology Meeting on Droplets (EMN)", (2015), 127 - 128. BibTeX
23. L. Filipovic, S. Selberherr:
"About Processes and Performance of Integrated Gas Sensor Components";
Talk: Energy-Materials-Nanotechnology Fall Meeting (EMN), Orlando, USA; (invited) 2014-11-22 - 2014-11-25; in "Abstracts of the Energy-Materials-Nanotechnology Fall Meeting (EMN)", (2014), 96 - 97. BibTeX
22. L. Filipovic, S. Selberherr:
"Spray Pyrolysis Deposition for Gas Sensor Integration in the Backend of Standard CMOS Processes";
Talk: International Conference on Solid State and Integrated Circuit Technology (ICSICT), Guilin, China; (invited) 2014-10-28 - 2014-10-31; in "Proc.Intl.Conf.on Solid-State and Integrated Circuit Technology (ICSICT)", (2014), ISBN: 978-1-4799-3282-5, 1692 - 1695 doi:10.1109/ICSICT.2014.7021507. BibTeX
21. L. Filipovic, S. Selberherr:
"Stress Considerations for System-on-Chip Gas Sensor Integration in CMOS Technology";
Talk: International Workshop on Stress-Induced Phenomena in Microelectronics, Austin, TX, USA; 2014-10-15 - 2014-10-17; in "Abstracts of 13th International Workshop on Stress-Induced Phenomena in Microelectronics", (2014), 46. BibTeX
20. L. Filipovic, S. Selberherr:
"The Effects of Etching and Deposition on the Performance and Stress Evolution of Open Through Silicon Vias";
Talk: European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Berlin, Germany; 2014-09-29 - 2014-10-02; in "Abstracts 25th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF)", (2014), 36. BibTeX
19. L. Filipovic, F. Rudolf, E. Baer, P. Evanschitzky, J. Lorenz, F. Roger, A. P. Singulani, R. Minixhofer, S. Selberherr:
"Three-Dimensional Simulation for the Reliability and Electrical Performance of Through-Silicon Vias";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Yokohama, Japan; 2014-09-09 - 2014-09-11; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2014), ISBN: 978-1-4799-5285-4, 341 - 344 doi:10.1109/SISPAD.2014.6931633. BibTeX
18. L. Filipovic, R. Orio, S. Selberherr:
"Effects of Sidewall Scallops on the Performance and Reliability of Filled Copper and Open Tungsten TSVs";
Talk: IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Singapore, Singapore; 2014-06-30 - 2014-07-04; in "Proceedings of the 21st International Symposium on the Physical and Failure Analysis of Integrated Circuits", (2014), ISBN: 978-1-4799-3931-2, 321 - 326 doi:10.1109/IPFA.2014.6898137. BibTeX
17. L. Filipovic, R. Orio, S. Selberherr, A. P. Singulani, F. Roger, R. Minixhofer:
"Effects of Sidewall Scallops on Open Tungsten TSVs";
Talk: International Reliability Physics Symposium (IRPS), Waikoloa, Hawaii, USA; 2014-06-01 - 2014-06-05; in "Proceedings of the International Reliability Physics Symposium (IRPS)", (2014), ISBN: 978-1-4799-3317-4, 3E.3.1 - 3E.3.6 doi:10.1109/IRPS.2014.6860633. BibTeX
16. L. Filipovic, R. Orio, S. Selberherr:
"Process and Reliability of SF6/O2 Plasma Etched Copper TSVs";
Talk: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Ghent, Belgium; 2014-04-07 - 2014-04-09; in "Proceedings of the IEEE 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)", (2014), ISBN: 978-1-4799-4791-1, 4 page(s) doi:10.1109/EuroSimE.2014.6813768. BibTeX
15. E. Baer, P. Evanschitzky, J. Lorenz, F. Roger, R. Minixhofer, L. Filipovic, R. Orio, S. Selberherr:
"Coupled Simulation to Determine Across Wafer Variations for Electrical and Reliability Parameters of Through-Silicon VIAs";
Talk: European Workshop on Materials for Advanced Metallization (MAM), Chemnitz, Germany; 2014-03-02 - 2014-03-05; in "Book of Abstracts", (2014), 2 page(s) . BibTeX
14. L. Filipovic, R. Orio, S. Selberherr:
"Process and Performance of Copper TSVs";
Talk: Workshop of the Thematic Network on Silicon On Insulator Technology, Devices and Circuits (EUROSOI), Tarragona, Spain; 2014-01-27 - 2014-01-29; in "Conference Proceedings of the Tenth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits", (2014), 1 - 2. BibTeX
13. L. Filipovic, S. Selberherr, G. Mutinati, E. Brunet, S. Steinhauer, A. Köck, J. Teva, J. Kraft, J. Siegert, F. Schrank, C. Gspan, W. Grogger:
"Modeling the Growth of Thin SnO2 Films using Spray Pyrolysis Deposition";
Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Glasgow, Scotland, United Kingdom; 2013-09-03 - 2013-09-05; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2013), ISBN: 978-1-4673-5733-3, 208 - 211 doi:10.1109/SISPAD.2013.6650611. BibTeX
12. L. Filipovic, S. Selberherr, G. Mutinati, E. Brunet, S. Steinhauer, A. Köck, J. Teva, J. Kraft, J. Siegert, F. Schrank:
"Modeling Spray Pyrolysis Deposition";
Talk: World Congress on Engineering (WCE), London, UK; 2013-07-03 - 2013-07-05; in "Proceedings of the World Congress on Engineering (WCE) Vol II", (2013), ISBN: 978-988-19252-8-2, 987 - 992. BibTeX
11. A. P. Singulani, H. Ceric, L. Filipovic, E. Langer:
"Impact of Bosch Scallops Dimensions on Stress of an Open Through Silicon Via Technology";
Talk: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, Poland; 2013-04-14 - 2013-04-17; in "Proceedings of the IEEE 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EurSimE)", (2013), ISBN: 978-1-4673-6137-8, 6 page(s) doi:10.1109/EuroSimE.2013.6529938. BibTeX
10. L. Filipovic, S. Selberherr:
"Simulations of Local Oxidation Nanolithography by AFM Based on the Generated Electric Field";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Denver, CO, USA; 2012-09-05 - 2012-09-07; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2012), ISBN: 978-0-615-71756-2, 189 - 192. BibTeX
9. L. Filipovic, S. Selberherr:
"Electric Field Based Simulations of Local Oxidation Nanolithography using Atomic Force Microscopy in a Level Set Environment";
Talk: Intl. Symposium on Microelectronics Technology and Devices (SBMicro), Brasilia, Brazil; 2012-08-30 - 2012-09-02; in "ECS Transactions", (2012), 1, ISBN: 978-1-56677-990-6, 265 - 272 doi:10.1149/04901.0265ecst. BibTeX
8. L. Filipovic, S. Selberherr:
"Simulation of Silicon Nanopatterning Using nc-AFM";
Poster: International Conference on non-contact Atomic Force Microscopy, Cesky Krumlov; 2012-07-01 - 2012-07-05; in "Abstracts 15th International Conference on non-contact Atomic Force Microscopy (nc-AFM)", (2012), 108. BibTeX
7. J. Weinbub, K. Rupp, L. Filipovic, A. Makarov, S. Selberherr:
"Towards a Free Open Source Process and Device Simulation Framework";
Poster: International Workshop on Computational Electronics (IWCE), Madison, WI, USA; 2012-05-22 - 2012-05-25; in "Book of Abstracts of the International Workshop on Computational Electronics (IWCE)", (2012), 141 - 142. BibTeX
6. L. Filipovic, S. Selberherr:
"A Level Set Simulator for Nanooxidation using Non-Contact Atomic Force Microscopy";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Osaka, Japan; 2011-09-08 - 2011-09-10; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2011), ISBN: 978-1-61284-418-3, 307 - 310 doi:10.1109/SISPAD.2011.6035031. BibTeX
5. L. Filipovic, S. Selberherr:
"A Two-Dimensional Lorentzian Distribution for an Atomic Force Microscopy Simulator";
Talk: Seminar on Monte Carlo Methods (MCM), Borovets; 2011-08-29 - 2011-09-02; in "Abstracts IMACS Seminar on Monte Carlo Methods (MCM)", (2011), 30. BibTeX
4. L. Filipovic, M. Nedjalkov, S. Selberherr:
"A Monte Carlo Simulator for Non-Contact Atomic Force Microscopy";
Talk: International Conference on Large-Scale Scientific Computations (LSSC), Sozopol, Bulgaria; 2011-06-06 - 2011-06-10; in "Abstracts Intl. Conf. on Large-Scale Scientific Computations", (2011), 42 - 43. BibTeX
3. L. Filipovic, H. Ceric, J. Cervenka, S. Selberherr:
"A Simulator for Local Anodic Oxidation of Silicon Surfaces";
Talk: IEEE Canadian Conference on Electrical and Computer Engineering (CCECE), Niagara Falls, Canada; 2011-05-08 - 2011-05-11; in "Proceedings of the 24th Canadian Conference on Electrical and Computer Engineering (CCECE 2011)", (2011), ISBN: 978-1-4244-9789-8, 695 - 698 doi:10.1109/CCECE.2011.6030543. BibTeX
2. L. Filipovic, O. Ertl, S. Selberherr:
"Parallelization Strategy for Hierarchical Run Length Encoded Data Structures";
Talk: IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011), Innsbruck; 2011-02-15 - 2011-02-17; in "Proceedings of the IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011)", (2011), ISBN: 978-0-88986-864-9, 131 - 138 doi:10.2316/P.2011.719-045. BibTeX
1. O. Ertl, L. Filipovic, S. Selberherr:
"Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Bologna, Italy; 2010-09-06 - 2010-09-08; in "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)", (2010), ISBN: 978-1-4244-7700-5, 49 - 52 doi:10.1109/SISPAD.2010.5604573. BibTeX

Talks and Poster Presentations (without Proceedings-Entry)

2. L. Filipovic, M. Kampl, T. Knobloch, G. Rzepa, J. Weinbub:
"Ihr Smartphone - Ein Supercomputer vor 20 Jahren. Ein Einblick in die Mikro- und Nanoelektronik (mit Virtual Reality)";
Talk: Lange Nacht der Forschung 2018, Wien; 2018-04-13. BibTeX
1. B. Ullmann, A. Grill, P. Manstetten, M. Jech, M. Kampl, W. H. Zisser, L. Filipovic, M. Thesberg, F. Rudolf, T. Windbacher, J. Cervenka, M. Katterbauer, J. Weinbub:
"Ihr Smartphone - ein Supercomputer vor 20 Jahren. Ein Einblick in die Mikro- und Nanoelektronik";
Talk: Lange Nacht der Forschung 2016, Wien; 2016-04-22. BibTeX

Habilitation Theses

1. L. Filipovic:
"Semiconductor Based Integrated Sensors";
TU Wien, Fakultät für Elektrotechnik und Informationstechnik, (2020), . BibTeX

Doctor's Theses (authored and supervised)

2. X. Klemenschits:
"Emulation and Simulation of Microelectronic Fabrication Processes";
Reviewer: L. Filipovic, A. Erdmann, H. Pottmann; Institut für Mikroelektronik, 2022, oral examination: 2022-04-08. BibTeX
1. L. Filipovic:
"Topography Simulation of Novel Processing Techniques";
Reviewer: S. Selberherr, D. Vasileska; Institut für Mikroelektronik, 2012, oral examination: 2012-12-17. BibTeX
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Institute for Microelectronics
Head: Univ. Prof. Dipl.-Ing. Dr. techn. Tibor Grasser
Deputy Head: O. Univ. Prof. Dipl.-Ing. Dr. techn. Dr.h.c. Siegfried Selberherr
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